Micromachined chip-scale plasma light source

Sensors and Actuators, A: Physical

Volumn 154, Issue 2, 2009, Pages 275-280

  Carazzetti, P ^a   Renaud, Ph ^a   Shea, H ^a  

^a EPFL   (Switzerland)

Author keywords

Aluminum electrodes; Anodic bonding; Hermetic sealing; Impedance matching; Interdigitated electrodes; Light source; Micromachining; Plasma; Spectroscopy

Indexed keywords

ALUMINUM ELECTRODES; ANODIC BONDING; HERMETIC SEALING; IMPEDANCE MATCHING; INTERDIGITATED ELECTRODES;

ALUMINA; ALUMINUM; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; ELECTRODES; HELIUM; IMPEDANCE MATCHING (ELECTRIC); LIGHT; LIGHT SOURCES; LIGHT TRANSMISSION; MICROMACHINING; PLASMAS; RESISTORS;

ELECTRIC DISCHARGES;

EID: 69549106602     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.05.028     Document Type: Article

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