Monitoring of metallic-atom-density in plasma processes by light source for absorption spectroscopy using micro hollow cathode discharge

IEEJ Transactions on Fundamentals and Materials

Volumn 130, Issue 10, 2010, Pages 972-976

  Ohta, Takayuki ^a   Ito, Masafumi ^b  

^a WAKAYAMA UNIVERSITY   (Japan)

^b MEIJO UNIVERSITY   (Japan)

Author keywords

Absorption spectroscopy; Measurement of metallic atom density; Micro hollow cathode lamp; Monitoring; Sputtering

Indexed keywords

ATOMS; BIREFRINGENCE; CATHODES; ELECTRIC DISCHARGES; ELECTRODES; ELECTRON SOURCES; LIGHT SOURCES; MAGNETRON SPUTTERING; MONITORING; SPUTTERING; ZINC;

ATOM DENSITY; CONVENTIONAL LIGHT SOURCES; INDIUM ZINC OXIDES; MICRO HOLLOW; MICRO-HOLLOW CATHODE DISCHARGES; PLASMA PROCESS; RADIO FREQUENCY MAGNETRON SPUTTERING; SPUTTERING PROCESS;

ABSORPTION SPECTROSCOPY;

EID: 78649506545     PISSN: 03854205     EISSN: 13475533     Source Type: Journal    
DOI: 10.1541/ieejfms.130.972     Document Type: Article

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