Optical and electrical characterization of pulse-modulated argon atmospheric-pressure inductively coupled microplasma jets

Journal of Applied Physics

Volumn 108, Issue 8, 2010, Pages

  Tajima, Satomi ^a   Matsumori, Masashi ^b   Nakatsuka, Shigeki ^b   Tsuchiya, Shouichi ^a   Ichiki, Takanori ^a  

^a UNIVERSITY OF TOKYO   (Japan)

^b Panasonic Factory Solutions Co Ltd   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL PARAMETER; CRITICAL POWER; DISCHARGE TUBE; DUTY RATIOS; DYNAMIC BEHAVIORS; EMISSION PEAKS; HIGH-DENSITY; HORIZONTAL AXIS; INDUCTIVELY-COUPLED; INNER DIAMETERS; MATCHING NETWORKS; MICRO-JET; MICRO-PLASMA JET; MODULATION FREQUENCIES; NONEQUILIBRIUM PLASMAS; OPTICAL AND ELECTRICAL CHARACTERIZATION; OUTPUT POWER; PREBREAKDOWN; REFLECTED POWER; STEADY STATE; TEMPORAL CHANGE; TIME-AVERAGED; VERTICAL AXIS; VERY HIGH FREQUENCY POWER;

ARGON; ELECTRIC DISCHARGES; ELECTRIC POWER SYSTEMS; ELECTROMAGNETIC INDUCTION; INDUCTIVELY COUPLED PLASMA; PLASMA DIAGNOSTICS;

PULSE GENERATORS;

EID: 78149453134     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3499272     Document Type: Article

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