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Journal of Chemical Physics

Volumn 135, Issue 6, 2011, Pages

High purity chemical etching and thermal passivation process for Ge(001) as nanostructure template

(6) Blumenstein, Christian a Meyer, Sebastian a Ruff, Andreas a Schmid, Benjamin a Schfer, Jrg a Claessen, Ralph a

a UNIVERSITY OF WÜRZBURG (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC SCALE; ATOMICALLY FLAT SURFACE; CARBON CONTAMINATION; CLEANING PROCESS; DETECTION LIMITS; HIGH PURITY CHEMICALS; LONG RANGE; NATIVE OXIDE LAYER; OXIDE LAYER; PIRANHA SOLUTIONS; PROTECTIVE OXIDE LAYERS; RAPID THERMAL OXIDATION; THERMAL PASSIVATION; WET-CHEMICAL ETCHING;

CHEMICAL CLEANING; ETCHING; GERMANIUM; LEAD OXIDE; NANOSTRUCTURES; PHOTOELECTRON SPECTROSCOPY; POLLUTION DETECTION; SCANNING TUNNELING MICROSCOPY; X RAY PHOTOELECTRON SPECTROSCOPY;

PASSIVATION;

EID: 80051871589 PISSN: 00219606 EISSN: None Source Type: Journal
DOI: 10.1063/1.3624902 Document Type: Article

Times cited : (17)

References (26)

1
- 0019398445
- 10.1080/00018738100101357
- E. E. Haller, W. L. Hansen, and F. S. Goulding, Adv. Phys. 30, 93 (1981). 10.1080/00018738100101357
- (1981) Adv. Phys. , vol.30 , pp. 93
- Haller, E.E.¹ Hansen, W.L.² Goulding, F.S.³

2
- 5444275992
- 10.1088/0268-1242/19/10/R02
- D. J. Paul, Semicond. Sci. Technol. 19, R75 (2004). 10.1088/0268-1242/19/ 10/R02
- (2004) Semicond. Sci. Technol. , vol.19 , pp. 75
- Paul, D.J.¹

3
- 37249061772
- High-k/Ge MOSFETs for future nanoelectronics
- DOI 10.1016/S1369-7021(07)70350-4, PII S1369702107703504
- Y. Kamata, Mater. Today 11, 30 (2008). 10.1016/S1369-7021(07)70350-4 (Pubitemid 350266412)
- (2008) Materials Today , vol.11 , Issue.1-2 , pp. 30-38
- Kamata, Y.¹

4
- 33747862495
- In situ chemical and structural investigations of the oxidation of Ge(001) substrates by atomic oxygen
- DOI 10.1063/1.2337543
- A. Molle, M. N. K. Bhuiyan, G. Tallarida, and M. Fanciulli, Appl. Phys. Lett. 89, 083504 (2006). 10.1063/1.2337543 (Pubitemid 44286188)
- (2006) Applied Physics Letters , vol.89 , Issue.8 , pp. 083504
- Molle, A.¹ Bhuiyan, M.N.K.² Tallarida, G.³ Fanciulli, M.⁴

5
- 57149090710
- 10.1103/PhysRevLett.101.236802
- J. Schfer, C. Blumenstein, S. Meyer, M. Wisniewski, and R. Claessen, Phys. Rev. Lett. 101, 236802 (2008). 10.1103/PhysRevLett.101.236802
- (2008) Phys. Rev. Lett. , vol.101 , pp. 236802
- Schfer, J.¹ Blumenstein, C.² Meyer, S.³ Wisniewski, M.⁴ Claessen, R.⁵

6
- 72049090944
- 10.1088/1367-2630/11/12/125011
- J. Schfer, S. Meyer, C. Blumenstein, K. Roensch, R. Claessen, S. Mietke, M. Klinke, T. Podlich, R. Matzdorf, A. A. Stekolnikov, S. Sauer, and F. Bechstedt, New J. Phys. 11, 125011 (2009). 10.1088/1367-2630/11/12/125011
- (2009) New J. Phys. , vol.11 , pp. 125011
- Schfer, J.¹ Meyer, S.² Blumenstein, C.³ Roensch, K.⁴ Claessen, R.⁵ Mietke, S.⁶ Klinke, M.⁷ Podlich, T.⁸ Matzdorf, R.⁹ Stekolnikov, A.A.¹⁰ Sauer, S.¹¹ Bechstedt, F.¹²

7
- 27144524175
- Quantum confinement between self-organized Pt nanowires on Ge(001)
- DOI 10.1103/PhysRevLett.95.116801, 116801
- N. Oncel, A. van Houselt, J. Huijben, A.-S. Hallbck, O. Gurlu, H. J. W. Zandvliet, and B. Poelsema, Phys. Rev. Lett. 95, 116801 (2005). 10.1103/PhysRevLett.95.116801 (Pubitemid 41505686)
- (2005) Physical Review Letters , vol.95 , Issue.11 , pp. 1-4
- Oncel, N.¹ Van Houselt, A.² Huijben, J.³ Hallback, A.-S.⁴ Gurlu, O.⁵ Zandvliet, H.J.W.⁶ Poelsema, B.⁷

8
- 69649108079
- 10.1103/PhysRevLett.93.066101
- O. Gurlu, H. J. W. Zandvliet, and B. Poelsema, Phys. Rev. Lett. 93, 066101 (2004). 10.1103/PhysRevLett.93.066101
- (2004) Phys. Rev. Lett. , vol.93 , pp. 066101
- Gurlu, O.¹ Zandvliet, H.J.W.² Poelsema, B.³

9
- 0141754156
- Visualization and spectroscopy of a metal-molecule-metal bridge
- DOI 10.1126/science.1088971
- G. V. Nazin, X. H. Qiu, and W. Ho, Science 302, 77 (2003). 10.1126/science.1088971 (Pubitemid 37210689)
- (2003) Science , vol.302 , Issue.5642 , pp. 77-81
- Nazin, G.V.¹ Qiu, X.H.² Ho, W.³

10
- 0035334336
- Development of procedures for obtaining clean, low-defect-density Ge(100) surfaces
- DOI 10.1116/1.1367264
- L. H. Chan, E. I. Altman, and Y. Liang, J. Vac. Sci. Technol. A 19, 976 (2001). 10.1116/1.1367264 (Pubitemid 32498508)
- (2001) Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films , vol.19 , Issue.3 , pp. 976-981
- Chan, L.H.¹ Altman, E.I.² Liang, Y.³

11
- 0031646808
- 10.1016/S0039-6028(97)00608-0
- S. Gan, L. Li, T. Nguyen, H. Qi, R. F. Hicks, and M. Yang, Surf. Sci. 395, 69 (1998). 10.1016/S0039-6028(97)00608-0
- (1998) Surf. Sci. , vol.395 , pp. 69
- Gan, S.¹ Li, L.² Nguyen, T.³ Qi, H.⁴ Hicks, R.F.⁵ Yang, M.⁶

12
- 0000959204
- 10.1103/PhysRevLett.74.1127
- J. E. Van Nostrand, S. J. Chey, M. A. Hasan, D. G. Cahill, and J. E. Greene, Phys. Rev. Lett. 74, 1127 (1995). 10.1103/PhysRevLett.74.1127
- (1995) Phys. Rev. Lett. , vol.74 , pp. 1127
- Van Nostrand, J.E.¹ Chey, S.J.² Hasan, M.A.³ Cahill, D.G.⁴ Greene, J.E.⁵

13
- 0032472187
- 10.1016/S0169-4332(97)00587-4
- H. Okumura, T. Akane, and S. Matsumoto, Appl. Surf. Sci. 125, 125 (1998). 10.1016/S0169-4332(97)00587-4
- (1998) Appl. Surf. Sci. , vol.125 , pp. 125
- Okumura, H.¹ Akane, T.² Matsumoto, S.³

14
- 0028495689
- 10.1016/0039-6028(94)91117-7
- K. Prabhakarana, T. Ogino, R. Hull, J. C. Bean, and L. J. Peticolas, Surf. Sci. 316, L1031 (1994). 10.1016/0039-6028(94)91117-7
- (1994) Surf. Sci. , vol.316 , pp. 1031
- Prabhakarana, K.¹ Ogino, T.² Hull, R.³ Bean, J.C.⁴ Peticolas, L.J.⁵

15
- 0033208007
- Preparation of clean and atomically flat germanium(001) surfaces
- DOI 10.1016/S0039-6028(99)00866-3
- J. S. Hovis, R. J. Hamers, and C. M. Greenlief, Surf. Sci. 440, L815 (1999). 10.1016/S0039-6028(99)00866-3 (Pubitemid 30517287)
- (1999) Surface Science , vol.440 , Issue.1-2
- Hovis, J.S.¹ Hamers, R.J.² Greenlief, C.M.³

16
- 0029273669
- 10.1016/0039-6028(94)00746-2
- K. Prabhakaran and T. Ogino, Surf. Sci. 325, 263 (1995). 10.1016/0039-6028(94)00746-2
- (1995) Surf. Sci. , vol.325 , pp. 263
- Prabhakaran, K.¹ Ogino, T.²

17
- 0030420887
- 10.1109/84.546406
- K. Williams and R. Muller, J. Microelectromech. Syst. 5, 256 (1996). 10.1109/84.546406
- (1996) J. Microelectromech. Syst. , vol.5 , pp. 256
- Williams, K.¹ Muller, R.²

18
- 0742286720
- 10.1109/JMEMS.2003.820936
- K. Williams, K. Gupta, and M. Wasilik, J. Microelectromech. Syst. 12, 761 (2003). 10.1109/JMEMS.2003.820936
- (2003) J. Microelectromech. Syst. , vol.12 , pp. 761
- Williams, K.¹ Gupta, K.² Wasilik, M.³

19
- 0003675250
- (Wiley, New York).
- S. M. Sze, Semiconductor Devices, Physics and Technology (Wiley, New York, 1985).
- (1985) Semiconductor Devices, Physics and Technology
- Sze, S.M.¹

20
- 34548230096
- Effective electrical passivation of Ge(100) for high- k gate dielectric layers using germanium oxide
- DOI 10.1063/1.2773759
- A. Delabie, F. Bellenger, M. Houssa, T. Conard, S. V. Elshocht, M. Caymax, M. Heyns, and M. Meuris, Appl. Phys. Lett. 91, 082904 (2007). 10.1063/1.2773759 (Pubitemid 47318977)
- (2007) Applied Physics Letters , vol.91 , Issue.8 , pp. 082904
- Delabie, A.¹ Bellenger, F.² Houssa, M.³ Conard, T.⁴ Van Elshocht, S.⁵ Caymax, M.⁶ Heyns, M.⁷ Meuris, M.⁸

21
- 67650507840
- 10.1063/1.3168501
- S. Saito, T. Hosoi, H. Watanabe, and T. Ono, Appl. Phys. Lett. 95, 011908 (2009). 10.1063/1.3168501
- (2009) Appl. Phys. Lett. , vol.95 , pp. 011908
- Saito, S.¹ Hosoi, T.² Watanabe, H.³ Ono, T.⁴

22
- 54949120181
- 10.1063/1.3006320
- M. Houssa, G. Pourtois, M. Caymax, M. Meuris, M. M. Heyns, V. V. Afanasev, and A. Stesmans, Appl. Phys. Lett. 93, 161909 (2008). 10.1063/1.3006320
- (2008) Appl. Phys. Lett. , vol.93 , pp. 161909
- Houssa, M.¹ Pourtois, G.² Caymax, M.³ Meuris, M.⁴ Heyns, M.M.⁵ Afanasev, V.V.⁶ Stesmans, A.⁷

23
- 0037276121
- 10.1116/1.1532737
- Z. Liu, Y. Sun, F. Machuca, P. Pianetta, W. E. Spicer, and R. F.W. Pease, J. Vac. Sci. Technol. A 21, 212 (2003). 10.1116/1.1532737
- (2003) J. Vac. Sci. Technol. A , vol.21 , pp. 212
- Liu, Z.¹ Sun, Y.² MacHuca, F.³ Pianetta, P.⁴ Spicer, W.E.⁵ Pease, R.F.W.⁶

24
- 0002889415
- 10.1016/S0169-4332(97)00511-4
- T. Deegan and G. Hughes, Appl. Surf. Sci. 123, 66 (1998). 10.1016/S0169-4332(97)00511-4
- (1998) Appl. Surf. Sci. , vol.123 , pp. 66
- Deegan, T.¹ Hughes, G.²

25
- 0028387002
- 10.1002/sia.740210302
- S. Tanuma, C. J. Powell, and D. R. Penn, Surf. Interface Anal. 21, 165 (1994). 10.1002/sia.740210302
- (1994) Surf. Interface Anal. , vol.21 , pp. 165
- Tanuma, S.¹ Powell, C.J.² Penn, D.R.³

26
- 0003459529
- (Perkin-Elmer Corporation, Minnesota).
- J. F. Moulder, W. F. Strickle, P. E. Sobol, and K. D. Bomben, Handbook of X-ray Photoelectron Spectroscopy (Perkin-Elmer Corporation, Minnesota, 1992).
- (1992) Handbook of X-ray Photoelectron Spectroscopy
- Moulder, J.F.¹ Strickle, W.F.² Sobol, P.E.³ Bomben, K.D.⁴

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