Enhanced nucleation and growth of diamond film on Si by CVD using a chemical precursor

Journal of Physical Chemistry C

Volumn 115, Issue 32, 2011, Pages 16063-16073

  Tiwari, Rajanish N ^a,c   Tiwari, Jitendra N ^b   Chang, Li ^c   Yoshimura, M ^a  

^a TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

^b Pohang University of Science and Technology (POSTECH)   (South Korea)

^c NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADAMANTANES; CARBON PHASIS; CHEMICAL PRECURSORS; DIAMOND DEPOSITION; DIAMOND GROWTH; INITIAL GROWTH PERIOD; INTERMEDIATE LAYERS; LOW-TEMPERATURE DEPOSITION; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITIONS; NANO DIAMOND; NUCLEATION AND GROWTH; NUCLEATION OF DIAMONDS; NUCLEATION PROCESS; PRE-TREATMENT; PT PARTICLE; ROOM TEMPERATURE; SILICIDATION; SUBSTRATE SURFACE; ULTRASONIC TREATMENTS;

DIAMOND DEPOSITS; DIAMOND FILMS; FILM GROWTH; HYDROCARBONS; NUCLEATION; PLASMA DEPOSITION; PLATINUM; SILICON; SILICON CARBIDE; SYNTHETIC DIAMONDS;

CHEMICAL VAPOR DEPOSITION;

EID: 80051767302     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp2041179     Document Type: Article

References (49)

1. Dearnaley, G.; Arps, J. H. Surf. Coat. Technol. 2005, 200, 2518-2524
2. Yan, J. K.; Chang, L. Nanotechnology 2006, 17, 5544-5548
3. Chen, H. G.; Chang, L. Diamond Relat. Mater. 2009, 18, 141-145
4. You, M. S.; Hong, F. C. N.; Jeng, Y. R.; Huang, S. M. Diamond Relat. Mater. 2009, 18, 155-159
5. Walkowiak, B.; Okroj, W.; Jerczynska, H.; Pawlowska, Z. Diamond Relat. Mater. 2009, 18, 651-656
6. Wolter, S. D.; McClure, M. T.; Glass, J. T.; Stoner, B. R. Appl. Phys. Lett. 1995, 66, 2810-2812
7. Tiwari, R. N.; Chen, W.-C.; Wang, W.-L.; Chang, L. J. Appl. Crystallogr. 2010, 43, 883-889
8. Saito, T.; Tsuruga, S.; Ohya, N.; Kusakabe, K.; Morooka, S.; Maeda, H.; Sawabe, A.; Suzuki, K. Diamond Relat. Mater. 1998, 7, 1381-1384
9. Tachibana, T.; Yokota, Y.; Hayashi, K.; Miyata, K.; Kobashi, K.; Shintani, Y. Diamond Relat. Mater. 2000, 9, 251-255
10. Tachibana, T.; Yokota, Y.; Miyata, K.; Kobashi, K.; Shintani, Y. Diamond Relat. Mater. 1997, 6, 266-271
11. Shintani, Y. J. Mater. Res. 1996, 11, 2955-1956
12. Tachibana, T.; Yokota, Y.; Miyata, K.; Onishi, T.; Kobashi, K.; Tarutani, M.; Takai, Y.; Shimizu, R.; Shintani, Y. Phys. Rev. B 1997, 56, 15967-15981
13. Hayashi, Y.; Matsushita, Y.; Soga, T.; Umeno, M.; Jimbo, T. Diamond Relat. Mater. 2002, 11, 499-503
14. Tiwari, R. N.; Tiwari, J. N.; Chang, L. Chem. Eng. J. 2010, 158, 641-645
15. Tiwari, R. N.; Chang, L. J. Appl. Phys. 2010, 107, 103305
16. Tiwari, J. N.; Tiwari, R. N.; Chang, Y. M.; Lin, K. L. ChemSusChem 2010, 3, 460-466
17. Umeno, M.; Noda, M.; Uchida, H.; Takeuchi, H. Diamond Relat. Mater. 2008, 17, 684-687
18. Tiwari, R. N.; Chang, L. Appl. Phys. Express 2010, 3, 045501
19. Oomens, J.; Polfer, N.; Pirali, O.; Ueno, Y.; Maboudian, R.; May, P. W.; Filik, J.; Dahl, J. E.; Liu, S.; Carlson, R. M. K. J. Mol. Spectrosc. 2006, 238, 158-167
20. Corn, R. M.; Shannon, V. L.; Synder, R. G.; Strauss, H. L. J. Chem. Phys. 1984, 81, 5231-5238
21. Filik, J.; Harvey, J. N.; Allan, N. L.; May, P. W.; Dahl, J. E. P.; Liu, S.; Carlson, R. M. K. Spectrochim. Acta, Part A 2006, 64, 681-692
22. Zheng, T.; Nishiyama, N.; Egashira, Y.; Ueyama, K. Stud. Surf. Sci. Catal. 2006, 162, 561-567
23. Tarakci, M.; Korkmaz, K.; Gencer, Y.; Usta, M. Surf. Coat. Technol. 2005, 199, 205-212
24. Sun, K. W.; Wang, C. Y. J. Phys.: Conf. Ser. 2007, 92, 012031
25. Costa, S.; Palen, E. B.; Kruszynska, M.; Bachmatiuk, A.; Kalenczuk, R. J. Mater. Sci.-Pol. 2008, 2, 433-441
26. Scheibe, B.; Palen, E. B.; Kalenczuk, R. J. Mater. Charact. 2010, 61, 185-191
27. Kobashi, K. Diamond Films: Chemical Vapor Deposition for Oriented and Heteroepitaxial Growth; Elsevier Science: Amsterdam, 2005.
28. Takabayashi, S.; Okamoto, K.; Shimada, K.; Motomitsu, K.; Motoyama, H.; Nakatani, T.; Sakaue, H.; Suzuki, H.; Takahagi, T. Jpn. J. Appl. Phys. 2008, 47, 3376-3379
29. Dagli, G.; Sung, N.-H. Polym. Compos. 1989, 10, 109-116
30. Smirnova, T. P.; Badalyan, A. M.; Borisov, V. O.; Yakovkina, L. V.; Kaichev, V. V.; Shmakov, A. N.; Nartova, A. V.; Rakhlin, V. I.; Fomina, A. N. High Energy Chem. 2003, 37, 303-309
31. Kvon, R. I.; Boronin, A. I.; Shaikhutdinov, S. K.; Buyanov, R. A. Appl. Surf. Sci. 1997, 120, 239-242
32. Delamar, M.; Dbsarmot, G.; Fagebaume, O.; Hitmi, R.; Pinson, J. Carbon 1997, 35, 801-807
33. Han, Y. X.; Ling, H.; Sun, J.; Zhao, M.; Gebre, T.; Lu, Y. F. Appl. Surf. Sci. 2008, 254, 2054-2058
34. Lambrecht, W. R. L; Lee, C. H.; Segall, B.; Angus, J. C.; Li, Z.; Sunkara, M. Nature 1993, 364, 607-610
35. Komvopoulos, K.; Xu, T. Diamond Relat. Mater. 2000, 9, 274-282
36. Feng, Z.; Komvopoulos, K.; Bogy, D. B.; Ager, J. W.; Anders, S.; Anders, A.; Wang, Z.; Brown, I. G. J. Appl. Phys. 1996, 79, 485
37. Barnes, P. N.; Wu, R. L. C. Appl. Phys. Lett. 1993, 62, 37-39
38. Schaller, E. M.; Kuettel, O. M.; Schlapbach, L. Phys. Status Solidi A 1996, 153, 415-429
39. Gsell, S.; Berner, S.; Brugger, T.; Schreck, M.; Brescia, R.; Fischer, M.; Greber, T.; Osterwalder, J.; Stritzker, B. Diamond Relat. Mater. 2008, 17, 1029-1034
40. Boukherroub, R.; Wayner, D. D. M.; Sproule, G. I.; Lockwood, D. J.; Canham, L. T. Nano Lett. 2001, 1, 713-717
41. Saw, K. G.; du Plessis, J. Mater. Lett. 2004, 58, 1344-1348
42. Ong, S.-E.; Zhang, S.; Du, H.; Sun, D. Diamond Relat. Mater. 2007, 16, 1628-1635
43. Ahmed, M.; Byrne, J. A.; McLaughlin, J. A. D. e-J. Surf. Sci. Nanotechnol. 2009, 7, 217-224
44. Parravano, G. J. Catal. 1970, 16, 1-15
45. Jacob, T.; Goddard, W. A., III J. Phys. Chem. B 2005, 109, 297-311
46. Mankelevich, Y. A.; Ashfold, M. N. R.; Ma, J. J. Appl. Phys. 2008, 104, 113304
47. Matusek, K.; Paal, Z. React. Kinet. Catal. Lett. 1999, 67, 241-246
48. Massalski, T. B.; Okamoto, H.; Subramanian, P. R.; Kacprzak, L., Eds.; Binary Alloy Phase Diagrams; ASM International: Materials Park, OH, 1990; p 794.
49. Roy, R.; Dewan, H. S.; Ravindranathan, P. Mater. Res. Bull. 1993, 28, 861-866