Deposition of DLC film from adamantane by using pulsed discharge plasma CVD

Diamond and Related Materials

Volumn 17, Issue 4-5, 2008, Pages 684-687

  Umeno, M ^a   Noda, M ^a   Uchida, H ^a   Takeuchi, H ^a  

^a CHUBU UNIVERSITY   (Japan)

Author keywords

Diamond like carbon; Optical properties; Plasma CVD

Indexed keywords

ENERGY GAP; HETEROJUNCTIONS; PHOTONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

ADAMANTANE; PULSED DISCHARGE PLASMA CVD;

DIAMOND LIKE CARBON FILMS;

EID: 42949160172     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2008.01.118     Document Type: Article

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