Chemical precursor for the synthesis of diamond films at low temperature

Applied Physics Express

Volumn 3, Issue 4, 2010, Pages

  Tiwari, Rajanish N ^a   Chang, Li ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ADAMANTANES; CHEMICAL PRECURSORS; CHEMICAL SPECIES; DIAMOND FORMATION; GASEOUS MIXTURE; LOW TEMPERATURES; MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITIONS; PRE-TREATMENTS; SI SUBSTRATES;

DIAMONDS; METHANE; MICROWAVES; PLASMA DEPOSITION; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL); X RAY DIFFRACTION;

DIAMOND FILMS;

EID: 77950666563     PISSN: 18820778     EISSN: 18820786     Source Type: Journal    
DOI: 10.1143/APEX.3.045501     Document Type: Article

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