Parametric study of bias-enhanced nucleation of diamond on platinum in microwave plasma

Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 251-255

  Tachibana, Takeshi ^a,b   Yokota, Yoshihiro ^a,b   Hayashi, Kazushi ^a,b   Miyata, Koichi ^a,b   Kobashi, Koji ^a   Shintani, Yoshihiro ^c  

^a OSAKA UNIVERSITY   (Japan)

^b KOBE STEEL LTD   (Japan)

^c UNIVERSITY OF TOKUSHIMA   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; CRYSTAL GROWTH; FILM GROWTH; GRAPHITE; METHANE; MICROWAVES; NUCLEATION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLATINUM; POLYCRYSTALLINE MATERIALS; SUBSTRATES; THERMAL EFFECTS;

BIAS-ENHANCED NUCLEATION (BEN);

DIAMOND FILMS;

EID: 0033729187     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00207-7     Document Type: Article

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