Molecular depth profiling by wedged crater beveling

Analytical Chemistry

Volumn 83, Issue 16, 2011, Pages 6410-6417

  Mao, Dan ^a   Lu, Caiyan ^a   Winograd, Nicholas ^a   Wucher, Andreas ^b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AFM; CLUSTER ION BEAMS; CRATER DEPTH; DELTA LAYERS; DEPTH RESOLUTION; EROSION RATES; GLANCING ANGLE; ION BEAM ENERGY; IRGANOX 1010; IRGANOX 3114; LIQUID NITROGEN TEMPERATURE; MOLECULAR DEPTH PROFILING; OPTIMIZED CONDITIONS; ORGANIC FILMS; ROOM TEMPERATURE; TIME OF FLIGHT SECONDARY ION MASS SPECTROMETRY;

ATOMIC FORCE MICROSCOPY; EROSION; EXPERIMENTS; ION BEAMS; IONS; LIQUID NITROGEN; SECONDARY ION MASS SPECTROMETRY; SOIL MECHANICS; SURFACE ROUGHNESS;

DEPTH PROFILING;

BUTYLCRESOL; DRUG DERIVATIVE; ION; IRGANOX 3114; PENTAERYTHRITOL TETRAKIS[3 (3,5 DI TERT BUTYL 4 HYDROXYPHENYL)PROPIONATE]; SILICON;

ARTICLE; ATOMIC FORCE MICROSCOPY; CHEMISTRY; INSTRUMENTATION; MASS SPECTROMETRY; METHODOLOGY; MOLECULAR IMAGING; TEMPERATURE;

BUTYLATED HYDROXYTOLUENE; IONS; MICROSCOPY, ATOMIC FORCE; MOLECULAR IMAGING; SILICON; SPECTROMETRY, MASS, SECONDARY ION; TEMPERATURE;

EID: 80051724334     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac201502w     Document Type: Article

References (31)

1. Mahoney, C. M.; Roberson, S. V.; Gillen, G. Depth profiling of 4-acetamindophenol-doped poly(lactic acid) films using cluster secondary ion mass spectrometry Anal. Chem. 2004, 76 (11) 3199-3207
2. Wagner, M. S. Molecular depth profiling of multilayer polymer films using time-of-flight secondary ion mass spectrometry Anal. Chem. 2005, 77 (3) 911-922
3. Shard, A. G.; Green, F. M.; Brewer, P. J.; Seah, M. P.; Gilmore, I. S. Quantitative molecular depth profiling of organic delta-layers by C-60 ion sputtering and SIMS J. Phys. Chem. B 2008, 112 (9) 2596-2605
4. Zheng, L. L.; Wucher, A.; Winograd, N. Depth resolution during C-60(+) profiling of multilayer molecular films Anal. Chem. 2008, 80 (19) 7363-7371
5. Willingham, D.; Kucher, A.; Winograd, N. Molecular depth profiling and imaging using cluster ion beams with femtosecond laser postionization Appl. Surf. Sci. 2008, 255 (4) 831-833
6. Lu, C. Y.; Wucher, A.; Winograd, N. Molecular depth profiling of buried lipid bilayers using C-60-secondary ion mass spectrometry Anal. Chem. 2011, 83 (1) 351-358
7. Fletcher, J. S.; Conlan, X. A.; Lockyer, N. P.; Vickerman, J. C. Molecular depth profiling of organic and biological materials Appl. Surf. Sci. 2006, 252 (19) 6513-6516
8. Wucher, A.; Cheng, J.; Winograd, N. Protocols for three-dimensional molecular imaging using mass spectrometry Anal. Chem. 2007, 79 (15) 5529-5539
9. Fletcher, J. S.; Lockyer, N. P.; Vaidyanathan, S.; Vickerman, J. C. TOF-SIMS 3D biomolecular imaging of Xenopus laevis oocytes using buckminsterfullerene (C-60) primary ions Anal. Chem. 2007, 79 (6) 2199-2206
10. Nygren, H.; Hagenhoff, B.; Malmberg, P.; Nilsson, M.; Richter, K. Bioimaging TOF-SIMS: High resolution 3D imaging of single cells Microsc. Res. Tech. 2007, 70 (11) 969-974
11. Sun, S.; Szakal, C.; Roll, T.; Mazarov, P.; Wucher, A.; Winograd, N. Use of C-60 cluster projectiles for sputter depth profiling of polycrystalline metals Surf. Interface Anal. 2004, 36 (10) 1367-1372
12. Postawa, Z.; Czerwinski, B.; Winograd, N.; Garrison, B. J. Microscopic insights into the sputtering of thin organic films on Ag{111} induced by C-60 and Ga bombardment J. Phys. Chem. B 2005, 109 (24) 11973-11979
13. Wagner, M. S.; Gillen, G. Impact energy dependence of SF5+ ion beam damage of poly(methyl methacrylate) studied by time-of-flight secondary ion mass spectrometry Appl. Surf. Sci. 2004, 231-2, 169-173
14. Mahoney, C. M.; Fahey, A. J.; Gillen, G.; Xu, C.; Batteas, J. D. Temperature-controlled depth profiling of poly(methyl methacrylate) using cluster secondary ion mass spectrometry. 2. Investigation of sputter-induced topography, chemical damage, and depolymerization effects Anal. Chem. 2007, 79 (3) 837-845
15. Gillen, G.; Roberson, S. Preliminary evaluation of an SF5+ polyatomic primary ion beam for analysis of organic thin films by secondary ion mass spectrometry Rapid Commun. Mass Spectrom. 1998, 12 (19) 1303-1312
16. Ninomiya, S.; Nakata, Y.; Ichiki, K.; Seki, T.; Aoki, T.; Matsuo, J. Measurements of secondary ions emitted from organic compounds bombarded with large gas cluster ions Nucl. Instrum. Meth. Phys. Res., Sect. B 2007, 256 (1) 493-496
17. Cheng, J.; Wucher, A.; Winograd, N. Molecular depth profiling with cluster ion beams J. Phys. Chem. B 2006, 110 (16) 8329-8336
18. Wucher, A.; Cheng, J.; Winograd, N. Molecular depth profiling using a C-60 cluster beam: The role of impact energy J. Phys. Chem. C 2008, 112 (42) 16550-16555
19. Cheng, J.; Winograd, N. Depth profiling of peptide films with TOF-SIMS and a C-60 probe Anal. Chem. 2005, 77 (11) 3651-3659
20. Mahoney, C. M.; Fahey, A. J.; Gillen, G. Temperature-controlled depth profiling of poly(methyl methacrylate) using cluster secondary ion mass spectrometry. 1. Investigation of depth profile characteristics Anal. Chem. 2007, 79 (3) 828-836
21. Piwowar, A. M.; Fletcher, J. S.; Kordys, J.; Lockyer, N. P.; Winograd, N.; Vickerman, J. C. Effects of cryogenic sample analysis on molecular depth profiles with TOF-secondary ion mass spectrometry Anal. Chem. 2010, 82 (19) 8291-8299
22. Sjovall, P.; Rading, D.; Ray, S.; Yang, L.; Shard, A. G. Sample cooling or rotation improves C-60 organic depth profiles of multilayered reference samples: Results from a VAMAS interlaboratory study J. Phys. Chem. B 2010, 114 (2) 769-774
23. Shard, A. G.; Rafati, A.; Ogaki, R.; Lee, J. L. S.; Hutton, S.; Mishra, G.; Davies, M. C.; Alexander, M. R. Organic depth profiling of a binary system: The compositional effect on secondary ion yield and a model for charge transfer during secondary ion emission J. Phys. Chem. B 2009, 113 (34) 11574-11582
24. Lee, J. L. S.; Ninomiya, S.; Matsuo, J.; Gilmore, I. S.; Seah, M. P.; Shard, A. G. Organic depth profiling of a nanostructured delta layer reference material using large argon cluster ions Anal. Chem. 2010, 82 (1) 98-105
25. Shard, A. G.; Foster, R.; Gilmore, I. S.; Lee, J. L. S.; Ray, S.; Yang, L. VAMAS interlaboratory study on organic depth profiling. Part I: Preliminary report Surf. Interface Anal. 2011, 43 (1-2) 510-513
26. Mao, D.; Wucher, A.; Winograd, N. Molecular depth profiling with cluster secondary ion mass spectrometry and wedges Anal. Chem. 2010, 82 (1) 57-60
27. Voigtmann, R.; Moldenhauer, W. Quantification of sputter depth profiles by means of wedge crater sputtering-A new technique for depth scale calibration Surf. Interface Anal. 1988, 13 (2-3) 167-172
28. Gillen, G.; Fahey, A.; Wagner, M.; Mahoney, C. 3D molecular imaging SIMS Appl. Surf. Sci. 2006, 252 (19) 6537-6541
29. Kozole, J.; Wucher, A.; Winograd, N. Energy deposition during molecular depth profiling experiments with cluster ion beams Anal. Chem. 2008, 80 (14) 5293-5301
30. Braun, R. M.; Blenkinsopp, P.; Mullock, S. J.; Corlett, C.; Willey, K. F.; Vickerman, J. C.; Winograd, N. Performance characteristics of a chemical imaging time-of-flight mass spectrometer Rapid Commun. Mass Spectrom. 1998, 12 (18) 1246
31. Gillen, G.; Batteas, J.; Michaels, C. A.; Chi, P.; Small, J.; Windsor, E.; Fahey, A.; Verkouteren, J.; Kim, K. J. Depth profiling using C60+SIMS-Deposition and topography development during bombardment of silicon Appl. Surf. Sci. 2006, 252 (19) 6521-6525