One-step substrate nanofabrication and patterning of nanoparticles by lithographically controlled etching

Nanotechnology

Volumn 22, Issue 35, 2011, Pages

  Bianchi, M ^a   Limones Herrero, D ^a   Valle, F ^a   Greco, P ^b   Ingo, G M ^a   Kaciulis, S ^a   Biscarini, F ^a   Cavallini, M ^a  

^a CNR   (Italy)

^b Scriba Nanotecnologie Srl   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BOTTOM UP APPROACH; CAPILLARY FORCE; COMPLEX NANOSTRUCTURES; COMPLEX STRUCTURE; ETCHING SOLUTIONS; FUNCTIONAL PATTERN; MULTISCALES; PRECISE POSITION; SELF-ORGANIZE; SINGLE-STEP; THIN LAYERS; TOPDOWN;

MOLDS; NANOPARTICLES; NANOWIRES; SURFACES;

ETCHING;

EID: 79961216697     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/35/355301     Document Type: Article

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