Fabrication process for large size mold and alignment method for nanoimprint system

IEEJ Transactions on Sensors and Micromachines

Volumn 130, Issue 8, 2010, Pages 363-368

  Ishibashi, Kentaro ^a   Kokubo, Mitsunori ^a   Goto, Hiroshi ^a   Mizuno, Jun ^b   Shoji, Shuichi ^b  

^a Toshiba Machine Co Ltd   (Japan)

^b WASEDA UNIVERSITY   (Japan)

Author keywords

Alignment system; CCD camera; Fringes; Large size mold fabrication; Moir ; Nanoimprint; Table; X Y

Indexed keywords

ALIGNMENT SYSTEM; FRINGES; LARGE SIZES; NANO-IMPRINT; TABLE;

CAMERAS; CCD CAMERAS; FABRICATION; IMAGE PROCESSING; LAPTOP COMPUTERS; MOLDS; PRODUCTION;

ALIGNMENT;

EID: 77956960400     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.130.363     Document Type: Article

References (7)

1. Y. Hirai and Y. Tanaka : "Application of nano-imprint lithography", Journal of Photopolymer Science and Technology, Vol.15, No.3, pp.475-480 (2002)
2. J. Y. Chen and K. W. Sun : "Enhancement of the light conversion efficiency of silicon solar cells by using nanoimprint anti-reflection layer", Solar Energy Materials and Solar Cell, Vol.94, No.3, pp.629-633 (2010)
3. S. W. Ahn, K. D. Lee, J. S. Kim, S. H. Lee, J. D. Park, and P. W. Yoon : "Fabrication of subwavelength aluminum wire grating using nanoimprint lithography and reactive ion etching", Microelectronic Engineering, Vol.78-79, No.1-4, pp.314-318 (2005)
4. S. Y. Chou, P. R. Krauss, and P. J. Renstrom : "Imprint of sub-25 nm vias and trenches in polymers", Applied Physics Letters, Vol.67, pp.3114-3116 (1995)
5. S. Kataza, K. Ishibashi, M. Kokubo, H. Goto, J. Mizuno, and S. Shoji : "Seamless pattern fabrication of large-area nano structures using ultraviolet nanoimprint lithography", Japanese Journal of Applied Physics, Vol.48, pp.06FH21-06FH23 (2009)
6. E. E. Moon, J. L. Patrick, N. Everett, and H. I. Smith : "Appplocation of interferometric broadband imaging alignment on an experimental x-ray stepper", Journal of Vacuum Science and Technology B, Vol.16, No.6, pp.3631-3636 (1998)
7. A. MoeL E. E. Moon, R. D. Frankel, and H. I. Smith : "Novel on-axis interferometic alignment method with sub-10 nm precision", Journal of Vacuum Science and Technology B, Vol.11, No.6, pp.2191-2194 (1993)