Sharp tip geometry and its effect on hardness in nanoindentation experiments

Journal of Applied Physics

Volumn 91, Issue 12, 2002, Pages 9689-9695

  Ikezawa, Kazuhiro ^a   Maruyama, Tadashi ^a  

^a WAKASA WAN ENERGY RESEARCH CENTER   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AREA FUNCTION; BERKOVICH INDENTERS; CROSS-SECTIONAL SHAPE; DIFFERENCE IN SHARPNESS; HARDNESS MEASUREMENT; INDENTERS; NANOINDENTATION EXPERIMENTS; SHARP INDENTER; SHARP TIP; SINGLE-CRYSTAL SI;

NANOINDENTATION;

HARDNESS;

EID: 0037098017     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1478794     Document Type: Article

References (35)

1. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992). jmr JMREEE 0884-2914
2. J. A. Knapp, D. M. Follstaedt, S. M. Myers, J. C. Barbour, and T. A. Friedmann, J. Appl. Phys. 85, 1460 (1999). jap JAPIAU 0021-8979
3. C. W. Shih, M. Yang, and J. C. M. Li, J. Mater. Res. 6, 2623 (1991). jmr JMREEE 0884-2914
4. Y. Yamada-Takamura, E. Shimono, and T. Yoshida, Symposium Proceedings of ISPC-14, Prague, Czech Republic, August 2-6, 1999, Vol. III, p. 1629.
5. J. C. Hay and G. M. Pharr, Mater. Res. Soc. Symp. Proc. 522, 39 (1998). mrs MRSPDH 0272-9172
6. A. J. Czaja and W. W. Gerberich, Mater. Res. Soc. Symp. Proc. 522, 293 (1998). mrs MRSPDH 0272-9172
7. Homepage of Hysitron Inc.: http://www.hysitron.com/webpage2/ Hysitron%20Tip%20Selection%20Guide.pdf
8. B. Bhushan, in Micro/Nano Tribology, edited by B. Bhushan, 2nd ed. (CRC Press, Boca Raton, 1999), p. 454.
9. J. B. Pethica, R. Hutchings, and W. C. Oliver, Philos. Mag. A 48, 593 (1983). pma PMAADG 0141-8610
10. See, for example, W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992). jmr JMREEE 0884-2914
11. M. P. Shemkunas and W. T. Petuskey, Mater. Res. Soc. Symp. Proc. 522, 275 (1998); mrs MRSPDH 0272-9172
12. Q. Wei, J. Sankar, A. K. Sharma, and J. Narayan, 649, Q.7.20.1 (2001). mrs MRSPDH 0272-9172
13. B. Wolf, Cryst. Res. Technol. 35, 377 (2000). crt CRTEDF 0232-1300
14. M. F. Doerner and W. D. Nix, J. Mater. Res. 1, 601 (1986). jmr JMREEE 0884-2914
15. I. N. Sneddon, Int. J. Eng. Sci. 3, 47 (1965). ijd IJESAN 0020-7225
16. X. Cai, J. Mater. Sci. Lett. 12, 301 (1993). jml JMSLD5 0261-8028
17. M. V. Swain and J. S. Field, Philos. Mag. A 74, 1085 (1996). pma PMAADG 0141-8610
18. J. Woirgard, C. Tromas, J. C. Girard, and V. Audurier, J. Eur. Ceram. Soc. 18, 2297 (1998). jeu JECSER 0955-2219
19. A. I. Lur'e, Three-Dimensional Problems of the Theory of Elasticity (Interscience, New York, 1964).
20. B. Bhushan, B. K. Gupta, and M. H. Azarian, Wear 181-183, 743 (1995). wea WEARCJ 0043-1648
21. C.-J. Lu and D. B. Bogy, Int. J. Solids Struct. 32, 1759 (1995). ijl IJSOAD 0020-7683
22. K. W. Xu, G. L. Hou, B. C. Hendix, J. W. He, Y. Sun, S. Zheng, A. Bloyce, and T. Bell, J. Mater. Res. 13, 3519 (1998). jmr JMREEE 0884-2914
23. A. V. Kulkarni and B. Bhushan, J. Mater. Res. 12, 2707 (1997). jmr JMREEE 0884-2914
24. W. W. Gerberich, W. Yu, D. Kramer, A. Strojny, D. Bahr, E. Lilleodden, and J. Nelson, J. Mater. Res. 13, 421 (1998). jmr JMREEE 0884-2914
25. C. L. Woodcock, D. F. Bahr, and N. R. Moody, Mater. Res. Soc. Symp. Proc. 649, Q7.14.1 (2001). mrs MRSPDH 0272-9172
26. K. W. McElhaney, J. J. Vlassak, and W. D. Nix, J. Mater. Res. 13, 1300 (1998). jmr JMREEE 0884-2914
27. K. Yasuda, K. Shinohara, M. Yamada, M. Kutsuwada, and C. Kinoshita, J. Nucl. Mater. 187, 109 (1992). jnu JNUMAM 0022-3115
28. H. Pelletier, J. Krier, A. Cornet, and P. Mille, Thin Solid Films 379, 147 (2000). tsf THSFAP 0040-6090
29. Y. Liu and A. H. W. Ngan, Scr. Mater. 44, 237 (2001). scz SCMAF7 1359-6462
30. W. C. Oliver, R. Hutchings, and J. B. Pethica, in Microindentation Techniques in Materials Science and Engineering (ASTM Special Technical Publication 889), edited by P. J. Blau and B. R. Lawn (International Metallographic Society, Philadelphia, 1984), pp. 90-108.
31. B. Bhushan, A. V. Kulkarni, W. Bonin, and J. T. Wyrobek, Philos. Mag. A 74, 1117 (1996). pma PMAADG 0141-8610
32. T. F. Page, W. C. Oliver, and C. J. McHargue, J. Mater. Res. 7, 450 (1992). jmr JMREEE 0884-2914
33. A. F. Jankowski, Thin Solid Films 343-344, 238 (1999). tsf THSFAP 0040-6090
34. T. W. Scharf, H. Deng, and J. A. Barnard, J. Vac. Sci. Technol. A 15, 963 (1997). jva JVTAD6 0734-2101
35. A. K. Bhattacharya and W. D. Nix, Int. J. Solids Struct. 24, 881 (1988). ijl IJSOAD 0020-7683