Optical anisotropy of AlN epilayer on sapphire substrate investigated by variable-angle spectroscopic ellipsometry

Optical Materials

Volumn 32, Issue 9, 2010, Pages 891-895

  Jiang, Wei ^a   Lin, Wei ^a   Li, Shuping ^a   Chen, Jincan ^a   Kang, Junyong ^a  

^a XIAMEN UNIVERSITY   (China)

Author keywords

Aln films; Ellipsometry; Optical anisotropy

Indexed keywords

ACOUSTIC GENERATORS; ALUMINUM NITRIDE; ELLIPSOMETRY; ENERGY GAP; EPILAYERS; III-V SEMICONDUCTORS; OPTICAL ANISOTROPY; REFRACTIVE INDEX; SAPPHIRE; SPECTROSCOPIC ELLIPSOMETRY; ZINC SULFIDE;

ALN FILMS; DISPERSION MODELING; ELLIPSOMETRIC SPECTRA; EXTINCTION COEFFICIENTS; OPTICAL SELECTION RULES; SAPPHIRE SUBSTRATES; VALENCE-BAND ORDERING; VARIABLE ANGLE SPECTROSCOPIC ELLIPSOMETRY;

NITROGEN COMPOUNDS;

EID: 79961110880     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optmat.2010.01.015     Document Type: Article

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