-
1
-
-
69249119394
-
-
10.1063/1.98280
-
M. Heyns and W. Tsai, MRS Bull. 34, 485 (2009). 10.1063/1.98280
-
(2009)
MRS Bull.
, vol.34
, pp. 485
-
-
Heyns, M.1
Tsai, W.2
-
3
-
-
0001056859
-
-
10.1103/PhysRevLett.44.420
-
W. E. Spicer, I. Lindau, P. Skeath, C. Y. Su, and P. Chye, Phys. Rev. Lett. 44, 420 (1980) 10.1103/PhysRevLett.44.420
-
(1980)
Phys. Rev. Lett.
, vol.44
, pp. 420
-
-
Spicer, W.E.1
Lindau, I.2
Skeath, P.3
Su, C.Y.4
Chye, P.5
-
4
-
-
0019058555
-
-
W. E. Spicer, I. Lindau, P. Skeath, and C. Y. Su, J. Vac. Sci. Technol. 17, 1019 (1980).
-
(1980)
J. Vac. Sci. Technol.
, vol.17
, pp. 1019
-
-
Spicer, W.E.1
Lindau, I.2
Skeath, P.3
Su, C.Y.4
-
5
-
-
0042341502
-
-
10.1063/1.1590743
-
P. D. Ye., Appl. Phys. Lett. 83, 180 (2003) 10.1063/1.1590743
-
(2003)
Appl. Phys. Lett.
, vol.83
, pp. 180
-
-
Ye, P.D.1
-
6
-
-
20844440321
-
3 gate dielectrics on GaAs grown by atomic layer deposition
-
DOI 10.1063/1.1899745, 152904
-
M. M. Frank., Appl. Phys. Lett. 86, 152904 (2005). 10.1063/1.1899745 (Pubitemid 40861439)
-
(2005)
Applied Physics Letters
, vol.86
, Issue.15
, pp. 1-3
-
-
Frank, M.M.1
Wilk, G.D.2
Starodub, D.3
Gustafsson, T.4
Garfunkel, E.5
Chabal, Y.J.6
Grazul, J.7
Muller, D.A.8
-
7
-
-
39749157907
-
-
10.1063/1.2801512
-
C. L. Hinkle, A. M. Sonnet, E. M. Vogel, S. McDonnell, G. J. Hughes, M. Milojevic, B. Lee, F. S. Aguirre-Tostado, K. J. Choi, H. C. Kim, J. Kim, and R. M. Wallace, Appl. Phys. Lett. 92, 071901 (2008). 10.1063/1.2801512
-
(2008)
Appl. Phys. Lett.
, vol.92
, pp. 071901
-
-
Hinkle, C.L.1
Sonnet, A.M.2
Vogel, E.M.3
McDonnell, S.4
Hughes, G.J.5
Milojevic, M.6
Lee, B.7
Aguirre-Tostado, F.S.8
Choi, K.J.9
Kim, H.C.10
Kim, J.11
Wallace, R.M.12
-
8
-
-
66749167599
-
-
H. D. Lee, T. Feng, L. Yu, D. Mastrogiovanni, A. Wan, T. Gustafsson, and E. Garfunkel, Appl. Phys. Lett. 94, 222108 (2009)
-
(2009)
Appl. Phys. Lett.
, vol.94
, pp. 222108
-
-
Lee, H.D.1
Feng, T.2
Yu, L.3
Mastrogiovanni, D.4
Wan, A.5
Gustafsson, T.6
Garfunkel, E.7
-
9
-
-
77954334694
-
-
10.1063/1.1641527
-
H. D. Lee, T. Feng, L. Yu, D. Mastrogiovanni, A. Wan, T. Gustafsson, and E. Garfunkel Phys. Status Solidi C 7, 260 (2010). 10.1063/1.1641527
-
(2010)
Phys. Status Solidi C
, vol.7
, pp. 260
-
-
Lee, H.D.1
Feng, T.2
Yu, L.3
Mastrogiovanni, D.4
Wan, A.5
Gustafsson, T.6
Garfunkel, E.7
-
10
-
-
67349114865
-
-
10.1016/j.mee.2009.03.090
-
M. Caymax, G. Brammertz, A. Delabie, S. Sioncke, D. Lin, M. Scarrozza, G. Pourtois, W. Wang, M. Meuris, and M. Heyns, Microelectron. Eng. 86, 1529 (2009). 10.1016/j.mee.2009.03.090
-
(2009)
Microelectron. Eng.
, vol.86
, pp. 1529
-
-
Caymax, M.1
Brammertz, G.2
Delabie, A.3
Sioncke, S.4
Lin, D.5
Scarrozza, M.6
Pourtois, G.7
Wang, W.8
Meuris, M.9
Heyns, M.10
-
11
-
-
79961067492
-
-
See supplementary material at E-APPLAB-99-070130 for a detailed description of the experimental setuas well as the peak fitting procedure.
-
See supplementary material at http://dx.doi.org/10.1063/1.3615784 E-APPLAB-99-070130 for a detailed description of the experimental setup as well as the peak fitting procedure.
-
-
-
-
12
-
-
84857054604
-
-
(in press). 10.1007/s11051-011-0319-x (2011)
-
M. Tallarida, M. Weisheit, K. Kolanek, M. Michling, H. J. Engelmann, and D. Schmeisser, J. Nanopart. Res. (in press). 10.1007/s11051-011-0319-x (2011)
-
J. Nanopart. Res.
-
-
Tallarida, M.1
Weisheit, M.2
Kolanek, K.3
Michling, M.4
Engelmann, H.J.5
Schmeisser, D.6
-
13
-
-
57549100403
-
-
M. V. Lebedev, E. Mankel, T. Mayer, and W. Jaegermann, J. Phys. Chem. C 112, 18510 (2008)
-
(2008)
J. Phys. Chem. C
, vol.112
, pp. 18510
-
-
Lebedev, M.V.1
Mankel, E.2
Mayer, T.3
Jaegermann, W.4
-
14
-
-
79961089228
-
-
G. Le Lay, D. Mao, A. Kahn, Y. Hwu, and G. Margaritondo, Phys. Rev. B 43, 14031 (1991).
-
(1991)
Phys. Rev. B
, vol.43
, pp. 14031
-
-
Le Lay, G.1
Mao, D.2
Kahn, A.3
Hwu, Y.4
Margaritondo, G.5
-
15
-
-
0020750368
-
Analysis of native oxide films and oxide-substrate reactions on iii-v semiconductors using thermochemical phase diagrams
-
DOI 10.1016/0040-6090(83)90420-0
-
G. P. Schwartz, Thin Solid Films 103, 3 (1983) 10.1016/0040-6090(83) 90420-0 (Pubitemid 13562209)
-
(1983)
Thin Solid Films
, vol.103
, Issue.1-2
, pp. 3-16
-
-
Schwartz, G.P.1
-
18
-
-
21744444606
-
-
In this case, the term "ligand exchange" is used to designate a somewhat different mechanism than commonly in the literature on ALD; see, e.g., 10.1146/annurev.matsci.15.1.177
-
In this case, the term "ligand exchange" is used to designate a somewhat different mechanism than commonly in the literature on ALD; see, e.g., R. L. Puurunen, J. Appl. Phys. 97, 121301 (2005). 10.1146/annurev.matsci.15.1. 177
-
(2005)
J. Appl. Phys.
, vol.97
, pp. 121301
-
-
Puurunen, R.L.1
-
19
-
-
79961084810
-
-
personal communication. 2010
-
S. Klejna and S. D. Elliott, personal communication. 2010
-
-
-
Klejna, S.1
Elliott, S.D.2
-
20
-
-
56849122383
-
-
10.1016/0038-1101(74)90100-2
-
M. Milojevic, C. L. Hinkle, F. S. Aguirre-Tostado, H. C. Kim, E. M. Vogel, J. Kim, and R. M. Wallace, Appl. Phys. Lett. 93, 252905 (2008). 10.1016/0038-1101(74)90100-2
-
(2008)
Appl. Phys. Lett.
, vol.93
, pp. 252905
-
-
Milojevic, M.1
Hinkle, C.L.2
Aguirre-Tostado, F.S.3
Kim, H.C.4
Vogel, E.M.5
Kim, J.6
Wallace, R.M.7
-
21
-
-
4244088597
-
-
10.1103/PhysRevB.15.865
-
H. Lüth, M. Büchel, R. Dorn, M. Liehr, and R. Matz, Phys. Rev. B 15, 865 (1977). 10.1103/PhysRevB.15.865
-
(1977)
Phys. Rev. B
, vol.15
, pp. 865
-
-
Lüth, H.1
Büchel, M.2
Dorn, R.3
Liehr, M.4
Matz, R.5
-
22
-
-
73449084479
-
-
10.1063/1.1361065
-
M. Scarrozza, G. Pourtois, M. Houssa, M. Caymax, A. Stesmans, M. Meuris, and M. M. Heyns, Appl. Phys. Lett. 95, 253504 (2009) 10.1063/1.1361065
-
(2009)
Appl. Phys. Lett.
, vol.95
, pp. 253504
-
-
Scarrozza, M.1
Pourtois, G.2
Houssa, M.3
Caymax, M.4
Stesmans, A.5
Meuris, M.6
Heyns, M.M.7
-
23
-
-
58049170071
-
-
10.1016/j.susc.2008.11.002
-
M. Scarrozza, G. Pourtois, M. Houssa, M. Caymax, M. Meuris, M. M. Heyns, and A. Stesmans, Surf. Sci. 603, 203 (2009). 10.1016/j.susc.2008.11.002
-
(2009)
Surf. Sci.
, vol.603
, pp. 203
-
-
Scarrozza, M.1
Pourtois, G.2
Houssa, M.3
Caymax, M.4
Meuris, M.5
Heyns, M.M.6
Stesmans, A.7
-
24
-
-
78650590738
-
-
10.1021/jp107880r
-
W. Wang, K. Xiong, R. M. Wallace, and K. Cho, J. Phys. Chem. C 114, 22610 (2010). 10.1021/jp107880r
-
(2010)
J. Phys. Chem. C
, vol.114
, pp. 22610
-
-
Wang, W.1
Xiong, K.2
Wallace, R.M.3
Cho, K.4
-
25
-
-
61349197531
-
-
10.1063/1.1522811
-
S. Sioncke, A. Delabie, G. Brammertz, T. Conard, A. Franquet, M. Caymax, A. Urbanzcyk, M. Heyns, M. Meuris, J. L. van Hemmen, W. Keuning, and W. M.M. Kessels, J. Electrochem. Soc. 156, H255 (2009). 10.1063/1.1522811
-
(2009)
J. Electrochem. Soc.
, vol.156
, pp. 255
-
-
Sioncke, S.1
Delabie, A.2
Brammertz, G.3
Conard, T.4
Franquet, A.5
Caymax, M.6
Urbanzcyk, A.7
Heyns, M.8
Meuris, M.9
Van Hemmen, J.L.10
Keuning, W.11
Kessels, W.M.M.12
-
26
-
-
73849108382
-
-
10.1109/TNANO.2004.842073
-
E. J. Kim, E. Chagarov, J. Cagnon, Y. Yuan, A. C. Kummel, P. M. Asbeck, S. Stemmer, K. C. Saraswat, and P. C. McIntyre, J. Appl. Phys. 106, 124508 (2009). 10.1109/TNANO.2004.842073
-
(2009)
J. Appl. Phys.
, vol.106
, pp. 124508
-
-
Kim, E.J.1
Chagarov, E.2
Cagnon, J.3
Yuan, Y.4
Kummel, A.C.5
Asbeck, P.M.6
Stemmer, S.7
Saraswat, K.C.8
McIntyre, P.C.9
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