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Volumn 99, Issue 4, 2011, Pages

Surface chemistry and Fermi level movement during the self-cleaning of GaAs by trimethyl-aluminum

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS DENSITY; GAAS; IN-SITU; NATIVE OXIDES; P-GAAS(100); VALENCE BAND EDGES;

EID: 79961084696     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3615784     Document Type: Article
Times cited : (38)

References (26)
  • 1
    • 69249119394 scopus 로고    scopus 로고
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    • M. Heyns and W. Tsai, MRS Bull. 34, 485 (2009). 10.1063/1.98280
    • (2009) MRS Bull. , vol.34 , pp. 485
    • Heyns, M.1    Tsai, W.2
  • 5
    • 0042341502 scopus 로고    scopus 로고
    • 10.1063/1.1590743
    • P. D. Ye., Appl. Phys. Lett. 83, 180 (2003) 10.1063/1.1590743
    • (2003) Appl. Phys. Lett. , vol.83 , pp. 180
    • Ye, P.D.1
  • 11
    • 79961067492 scopus 로고    scopus 로고
    • See supplementary material at E-APPLAB-99-070130 for a detailed description of the experimental setuas well as the peak fitting procedure.
    • See supplementary material at http://dx.doi.org/10.1063/1.3615784 E-APPLAB-99-070130 for a detailed description of the experimental setup as well as the peak fitting procedure.
  • 15
    • 0020750368 scopus 로고
    • Analysis of native oxide films and oxide-substrate reactions on iii-v semiconductors using thermochemical phase diagrams
    • DOI 10.1016/0040-6090(83)90420-0
    • G. P. Schwartz, Thin Solid Films 103, 3 (1983) 10.1016/0040-6090(83) 90420-0 (Pubitemid 13562209)
    • (1983) Thin Solid Films , vol.103 , Issue.1-2 , pp. 3-16
    • Schwartz, G.P.1
  • 17
    • 79952090346 scopus 로고    scopus 로고
    • 10.1109/LED.2007.910009
    • L. Lin and J. Robertson, Appl. Phys. Lett. 98, 082903 (2011). 10.1109/LED.2007.910009
    • (2011) Appl. Phys. Lett. , vol.98 , pp. 082903
    • Lin, L.1    Robertson, J.2
  • 18
    • 21744444606 scopus 로고    scopus 로고
    • In this case, the term "ligand exchange" is used to designate a somewhat different mechanism than commonly in the literature on ALD; see, e.g., 10.1146/annurev.matsci.15.1.177
    • In this case, the term "ligand exchange" is used to designate a somewhat different mechanism than commonly in the literature on ALD; see, e.g., R. L. Puurunen, J. Appl. Phys. 97, 121301 (2005). 10.1146/annurev.matsci.15.1. 177
    • (2005) J. Appl. Phys. , vol.97 , pp. 121301
    • Puurunen, R.L.1
  • 19
    • 79961084810 scopus 로고    scopus 로고
    • personal communication. 2010
    • S. Klejna and S. D. Elliott, personal communication. 2010
    • Klejna, S.1    Elliott, S.D.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.