Measurement of the point spread function of a soft X-ray microscope by single pixel exposure of photoresists

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8077, Issue , 2011, Pages

  Leontowich, Adam F G ^a   Tyliszczak, Tolek ^b   Hitchcock, Adam P ^a  

^a MCMASTER UNIVERSITY   (Canada)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

Aberrations; Point spread function; Radiation damage; X ray lithography; Zone plate

Indexed keywords

APPLIED PHYSICS; DOSE RANGE; HIGH DOSE; POINT-SPREAD FUNCTION; SINGLE PIXEL; SOFT X-RAY; ZONE PLATES;

OPTICAL SYSTEMS; OPTICAL TRANSFER FUNCTION; OPTICS; PHOTORESISTS; PIXELS; RADIATION DAMAGE; SUN; X RAY LITHOGRAPHY; X RAY MICROSCOPES;

X RAYS;

EID: 79960509791     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.887553     Document Type: Conference Paper

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