Experimental characterization of focusing by high-numerical-aperture zone plates

Journal of the Optical Society of America A: Optics and Image Science, and Vision

Volumn 23, Issue 3, 2006, Pages 567-571

  Menon, Rajesh ^a   Gil, Dario ^a,b   Smith, Henry I ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FOCUSING; LENSES; MASKS; OPTICAL TRANSFER FUNCTION; PHOTORESISTS;

HIGH-NUMERICAL-APERTURE ZONE PLATES; HIGH-RESOLUTION OPTICAL MASKLESS LITHOGRAPHY; SCANNING CONFOCAL FOCUSING PROPERTIES;

PHOTOLITHOGRAPHY;

EID: 33645385648     PISSN: 10847529     EISSN: None     Source Type: Journal    
DOI: 10.1364/JOSAA.23.000567     Document Type: Article

References (9)

1. R. Menon, A. A. Patel, D. Gil and H. I. Smith, "Maskless lithography," Mater. Today, February 2005, pp. 26-33.
2. L. Kipp, M. Skibowski, R. L. Johnson, R. Berndt, R. Adelung, S. Harm, and R. Seemann, "Sharper images by focusing soft X-rays with photon sieves," Nature 414, 184-188 (2001).
3. R. Menon, D. Gil, G. Barbastathis, and H. I. Smith, "Photon sieve lithography," J. Opt. Soc. Am. A 22, 342-345 (2005).
4. D. Gil, R. Menon, and H. I. Smith, "Fabrication of high-numerical-aperture phase zone plates with a single lithography exposure and no etching," J. Vac. Sci. Technol. B 21, 2956-2960 (2003).
5. D. W. Prather and S. Shi, "Formulation and application of the finite-difference time-domain method for the analysis of axially symmetric diffractive optical elements," J. Opt. Soc. Am. A 16, 1131-1142 (1999).
6. D. Gil, R. Menon, D. J. D. Carter, and H. I. Smith," Lithographic patterning and confocal imaging with zone plates," J. Vac. Sci. Technol. B 18, 2881-2885 (2000).
7. H. J. Tiziani, R. Achi, R. N. Kramer, and L. Wiegers, "Theoretical analysis of confocal microscopy with microlenses," Appl. Opt. 35, 120-125 (1996).
8. W. J. Dallas, H. H. Barrett, R. E. Wagner, H. Roehrig, and C. N. West, "Finite-length line-spread function," J. Opt. Soc. Am. A 4, 2039-2044 (1987).
9. T. Wilson and C. J. R. Sheppard, Theory and Practice of Scanning Optical Microscopy (Academic, 1984), Chap. 3.