25 nm mechanically buttressed high aspect ratio zone plates: Fabrication and performance

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3186-3190

  Olynick, Deirdre L ^a   Harteneck, Bruce D ^a   Veklerov, Eugene ^a   Tendulkar, Mihir ^a   Liddle, J Alexander ^a   Kilcoyne, A L David ^a   Tyliszczak, Tolek ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON-BEAM IMAGING; ENERGY RESOLUTION; HYDROGEN SILSESQUIOXANE (HSQ); ZONE PLATES;

APPROXIMATION THEORY; ASPECT RATIO; BANDWIDTH; CROSSLINKING; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; ELECTROPLATING; POLYMERS; SPECTROSCOPIC ANALYSIS; X RAY MICROSCOPES;

PLATES (STRUCTURAL COMPONENTS);

EID: 13244278373     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1815298     Document Type: Conference Paper

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