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Volumn , Issue , 2011, Pages 1276-1282

Application of piezoresistive stress sensor in wafer bumping and drop impact test of embedded ultra thin device

Author keywords

[No Author keywords available]

Indexed keywords

CHIP-LEVEL; DEVICE WAFERS; DIE CRACKING; DROP IMPACT; DROP TEST; ELECTRONIC PACKAGE; GROWING DEMAND; HAND HELD DEVICE; IN-PLANE STRESS; P-TYPE; PACKAGING PROCESS; PB FREE SOLDERS; PIEZORESISTIVE COEFFICIENTS; PIEZORESISTIVE STRESS SENSORS; PROCESS SELECTION; SILICON DEVICES; SOLDER BUMPING; STRESS EVALUATIONS; ULTRA THIN DIES; ULTRA-THIN; UNDER BUMP METALLIZATION; WAFER BUMPING;

EID: 79960387139     PISSN: 05695503     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ECTC.2011.5898675     Document Type: Conference Paper
Times cited : (5)

References (18)
  • 2
    • 0003209580 scopus 로고
    • Die stress measurement using piezoresistive stress sensor
    • Edited by J. H. Lau, Van Nostrand Reinhold, New York
    • Sweet, J. N., "Die Stress Measurement Using Piezoresistive Stress Sensor", in Thermal Stress and Strain in Microelectronics Packaging, Edited by J. H. Lau, Van Nostrand Reinhold, New York, 1993, pp. 221-268.
    • (1993) Thermal Stress and Strain in Microelectronics Packaging , pp. 221-268
    • Sweet, J.N.1
  • 5
    • 0030692924 scopus 로고    scopus 로고
    • Design and calibration of a 3-D micro-strain gauge for in-situ on chip stress measurements
    • Nov
    • T. C. P. Lo and P. C. H. Chan, "Design and Calibration of a 3-D Micro-strain Gauge for In-situ on Chip Stress Measurements", in Proc. ICSE, Malaysia, Nov. 1996. pp. 252-255.
    • (1996) Proc. ICSE, Malaysia , pp. 252-255
    • Lo, T.C.P.1    Chan, P.C.H.2
  • 8
    • 78649307395 scopus 로고
    • Evaluation of piezoresistive coefficient variation in silicon stress sensor using a four-point bending test fixture
    • Oct
    • R. E. Beaty, R. C. Jaeger, J. C. Suhling, R. W. Johnson, R. D. Butler, "Evaluation of Piezoresistive Coefficient Variation in Silicon Stress Sensor Using a Four-Point Bending Test Fixture", IEEE Trans. Comp. Hybrids Manuf. Technol., Vol. 15, No. 5, pp. 904-914, Oct. 1992.
    • (1992) IEEE Trans. Comp. Hybrids Manuf. Technol. , vol.15 , Issue.5 , pp. 904-914
    • Beaty, R.E.1    Jaeger, R.C.2    Suhling, J.C.3    Johnson, R.W.4    Butler, R.D.5
  • 10
    • 0002647466 scopus 로고    scopus 로고
    • Silicon piezoresistive stress sensors and their applications in electronic packaging
    • J. C. Suhling and R. C. Jaeger, "Silicon Piezoresistive Stress Sensors and Their Applications in Electronic Packaging", IEEE Sensors Journal, Vol. 1, No. 1, pp. 14-30, 2001.
    • (2001) IEEE Sensors Journal , vol.1 , Issue.1 , pp. 14-30
    • Suhling, J.C.1    Jaeger, R.C.2
  • 18
    • 0003602826 scopus 로고
    • Academic Press, San Diego, California, US, & 552
    • M. Ohring, The Materials Science of Thin Films, Academic Press, San Diego, California, US, 1991, pp. 325 & 552.
    • (1991) The Materials Science of Thin Films , pp. 325
    • Ohring, M.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.