Two-tone metal pattern transfer technique using a single mold surface

Microelectronic Engineering

Volumn 87, Issue 5-8, 2010, Pages 1019-1023

  Unno, Noriyuki ^a,b   Taniguchi, Jun ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b NONE   (Japan)

Author keywords

Metal oxide release layer; Metal patterning; Nanotransfer printing (nTP); Plastic substrate; Two tone pattern

Indexed keywords

METAL OXIDES; METAL PATTERNING; NANOTRANSFER PRINTING (NTP); PLASTIC SUBSTRATES; RELEASE LAYER;

METALLIC COMPOUNDS; MOLDS; NANOSTRUCTURED MATERIALS; PRINTING;

METALS;

EID: 76949106102     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2009.11.102     Document Type: Article

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