Three-dimensional metal nano pattern transfer on PET using metal oxide layer

Journal of Advanced Mechanical Design, Systems and Manufacturing

Volumn 4, Issue 5, 2010, Pages 1022-1032

  Unno, Noriyuki ^a,b   Taniguchi, Jun ^a  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b THE JAPANESE SOCIETY OF GASTROENTEROLOGICAL SURGERY   (Japan)

Author keywords

Electron beam lithography; Metal oxide release layer; Nanoimprint; Plastic substrate; Spin on glass; Three dimensional metal pattern

Indexed keywords

METAL OXIDES; NANOIMPRINT; PLASTIC SUBSTRATE; SPIN ON GLASS; THREE-DIMENSIONAL METAL PATTERN;

ASPECT RATIO; DISPLAY DEVICES; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; FLEXIBLE DISPLAYS; GLASS; GLASSY CARBON; METALLIC COMPOUNDS; NANOIMPRINT LITHOGRAPHY; POLYETHYLENE TEREPHTHALATES; PRINTING; SPIN GLASS; SUBSTRATES; THREE DIMENSIONAL;

METALS;

EID: 78650143554     PISSN: None     EISSN: 18813054     Source Type: Journal    
DOI: 10.1299/jamdsm.4.1022     Document Type: Article

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