SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 86, Issue 4-6, 2009, Pages 590-595

Nanoprint lithography of gold nanopatterns on polyethylene terephthalate

(4) Taniguchi, Jun a Ide, Shouichi a Unno, Noriyuki a Sakaguchi, Hiroshi b,c

a TOKYO UNIVERSITY OF SCIENCE (Japan)

b EHIME UNIVERSITY (Japan)

c JAPAN SCIENCE AND TECHNOLOGY AGENCY (Japan)

Author keywords

Chromium; Gold; Hard stamp; Inorganic electron beam resist; Nanoprint lithography; Polyethylene terephthalate (PET); Spin on glass (SOG)

Indexed keywords

ATMOSPHERIC AIRS; CHROMIUM LAYERS; ELECTRON-BEAM LITHOGRAPHIES; GAP WIDTHS; HARD STAMP; INORGANIC ELECTRON BEAM RESIST; METAL PATTERNS; NANO-PATTERNS; NANOPRINT LITHOGRAPHY; PET SUBSTRATES; PLASTIC SUBSTRATES; POSITIVE TONES; RELEASE COATINGS; RELEASE LAYERS; SMOOTH SURFACES; SPIN-ON-GLASS (SOG); VERY HIGH RESOLUTIONS;

CHROMIUM; COUPLING AGENTS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRONS; GLASS; GOLD; OXIDE MINERALS; POLYESTERS; POLYETHYLENE TEREPHTHALATES; QUARTZ; SPIN DYNAMICS; SPIN GLASS;

SUBSTRATES;

EID: 67349120840 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2008.11.053 Document Type: Article

Times cited : (28)

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