PMMA nanocolumn array fabricated by catalytic etching and nanomolding technique

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 2576-2579

  Huang, Mao Jung ^a   Yang, Chii Rong ^b   Chang, Chun Ming ^a   Lin, Chun Ting ^a   Tang, Yu Hsiang ^a   Shiao, Ming Hua ^a   Chiou, Yuang Cherng ^c   Lee, Rong Tsong ^c  

^a INSTRUMENT TECHNOLOGY RESEARCH CENTER   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

^c NATIONAL SUN YAT SEN UNIVERSITY   (Taiwan)

Author keywords

Catalytic etching; Nano column; Nano molding; SANL

Indexed keywords

CATALYTIC ETCHING; HOT EMBOSSING PROCESS; NANO-COLUMN; NANO-MOLDING; SANL; SELF-ASSEMBLED;

ASPECT RATIO; CONTACT ANGLE; ELECTROFORMING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SPHERES;

ETCHING;

EID: 79960050332     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2011.02.028     Document Type: Conference Paper

References (20)

1. H. Becker, and U. Heim Sens. Actuator, A 83 2000 130 135
2. M. Heckele, and W.K. Schomburg J. Micromech. Microeng. 14 2004 R1 R14
3. D. Li, Y. Wu, P. Kim, L. Shi, P. Yang, and A. Majumdar Appl. Phys. Lett. 83 2003 2934 2936
4. S. Koynov, M. Brandt, and M. Stutzmann Appl. Phys. Lett. 88 2006 203107
5. M.J. Huang, C.R. Yang, R.T. Lee, and Y.C. Chiou J. Micromech. Microeng. 19 2009 0450034
6. K.H. Park, S. Lee, K.H. Koh, R. Lacerda, K.B.K. Teo, and W.I. Milne J. Appl. Phys. 97 2005 024311
7. K.J. Morton, G. Nieberg, S. Bai, and S.Y. Chou Nanotechnology 19 2008 345301
8. J.C. Hulteen, and R.P.V. Duyne J. Vac. Sci. Technol., A 13 1995 1553 1558
9. X. Li, and P.W. Bohn Appl. Phys. Lett. 77 2000 2572 2574
10. O.J. Hildreth, W. Lin, and C.P. Wong ACS Nano 3 2009 4033 4042
11. V. Lehmann, R. Stengl, and A. Luigart Mater. Sci. Eng., B 69-70 2000 11 22
12. C.L. Cheung, R.J. Nikolíc, and C.E. Reinhardt Nanotechnology 17 2006 1339 1343
13. J.Y. Shiu, C.W. Kuo, P. Chen, and C.Y. Mou Chem. Mater. 16 2004 561 564
14. K.K.S. Lau, J. Bico, K.B.K. Teo, M. Chhowalla, G.A.J. Amaratunga, W.I. Milne, G.H. McKinley, and K.K. Gleason Nano Lett. 3 2003 1701 1705
15. R. Maboudian, W.R. Ashurst, and C. Carraro Sens. Actuators, A Phys. 82 2000 219 223
16. N. Tas, T. Sonnenberg, H. Jansen, R. Legtenberg, and M. Elwenspoek J. Micromech. Microeng. 6 1996 385 397
17. I. Jafri, H. Busta, and S. Walsh SPIE 3880 1999 51 58
18. L. Ristic, Artech House, 1994.
19. W.B. Young Microelectron. Eng. 77 2005 405 411
20. X. Wnag, Y. Chen, S. Banu, H. Morgan, S. Fu, and Z. Cui Microelectron. Eng. 84 2007 872 876