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Volumn 98, Issue 19, 2011, Pages

Conversion of strain state from biaxial to uniaxial in strained silicon

Author keywords

[No Author keywords available]

Indexed keywords

AZIMUTHAL ANGLE; PATTERNED STRUCTURE; POISSON'S EFFECTS; RAMAN SHIFT; SHAPE DEPENDENCE; STRAIN STATE; STRAINED SILICON;

CARRIER MOBILITY; FINITE ELEMENT METHOD;

TENSILE STRAIN;

EID: 79959640734 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3589981 Document Type: Article

Times cited : (12)

References (15)

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