SCOPUS 정보 검색 플랫폼

Materials Science and Engineering: B

Volumn 135, Issue 3, 2006, Pages 184-187

Relaxation of strain in patterned strained silicon investigated by UV Raman spectroscopy

(8) Himcinschi, C a Radu, I a Singh, R a Erfurth, W a Milenin, A P a Reiche, M a Christiansen, S H a Gosele U a

a MAX PLANCK INSTITUTE OF MICROSTRUCTURE PHYSICS (Germany)

Author keywords

Raman spectroscopy; SiGe; Strain relaxation; Strained silicon

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; NANOTECHNOLOGY; RAMAN SPECTROSCOPY; REACTIVE ION ETCHING; STRAIN; STRESS RELAXATION; TENSILE STRESS; ULTRAVIOLET RADIATION;

EPITAXIAL LAYERS; NANO-PATTERNING; STRAIN RELAXATION; STRAINED SILICON;

SEMICONDUCTING SILICON;

EID: 33750744492 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/j.mseb.2006.08.023 Document Type: Article

Times cited : (22)

References (13)

1
- 0343578945
- Fitzgerald E.A., Xie Y.-H., Green M.L., Brasen D., Kortan A.R., Michel J., Mii Y.-J., and Weir B.E. Appl. Phys. Lett. 59 (1991) 811
- (1991) Appl. Phys. Lett. , vol.59 , pp. 811
- Fitzgerald, E.A.¹ Xie, Y.-H.² Green, M.L.³ Brasen, D.⁴ Kortan, A.R.⁵ Michel, J.⁶ Mii, Y.-J.⁷ Weir, B.E.⁸

2
- 0035519123
- Currie M.T., Leitz C.W., Langdo T.A., Taraschi G., and Fitzgerald E.A. J. Vac. Sci. Technol. B 19 (2001) 2268
- (2001) J. Vac. Sci. Technol. B , vol.19 , pp. 2268
- Currie, M.T.¹ Leitz, C.W.² Langdo, T.A.³ Taraschi, G.⁴ Fitzgerald, E.A.⁵

3
- 0037868881
- Nayak D.K., and Chun S.K. Appl. Phys. Lett. 64 (1994) 2514
- (1994) Appl. Phys. Lett. , vol.64 , pp. 2514
- Nayak, D.K.¹ Chun, S.K.²

4
- 33144456500
- Abstreiter G., Brugger H., Wolf T., Jork H., and Herzog H.J. Phys. Rev. Lett. 54 (1985) 2441
- (1985) Phys. Rev. Lett. , vol.54 , pp. 2441
- Abstreiter, G.¹ Brugger, H.² Wolf, T.³ Jork, H.⁴ Herzog, H.J.⁵

5
- 0038102536
- De Wolf I. Spectrosc. Europe 15 (2003) 6
- (2003) Spectrosc. Europe , vol.15 , pp. 6
- De Wolf, I.¹

6
- 0030081591
- De Wolf I. Semicond. Sci. Technol. 11 (1996) 139
- (1996) Semicond. Sci. Technol. , vol.11 , pp. 139
- De Wolf, I.¹

7
- 0035310657
- Dombrowski K.F., Dietrich B., De Wolf I., Rooyackers R., and Badenes G. Microel. Reliability 41 (2001) 511
- (2001) Microel. Reliability , vol.41 , pp. 511
- Dombrowski, K.F.¹ Dietrich, B.² De Wolf, I.³ Rooyackers, R.⁴ Badenes, G.⁵

8
- 0012651124
- Dietrich B., and Dombrowski K.F. J. Raman Spectrosc. 30 (1999) 893
- (1999) J. Raman Spectrosc. , vol.30 , pp. 893
- Dietrich, B.¹ Dombrowski, K.F.²

9
- 0015331738
- Kishino S., Origima M., and Kurata K. J. Eletrochem. Soc. 119 (1972) 617
- (1972) J. Eletrochem. Soc. , vol.119 , pp. 617
- Kishino, S.¹ Origima, M.² Kurata, K.³

10
- 0037096488
- Chen H., Li Y.K., Peng C.S., Liu H.F., Liu Y.L., Huang Q., Zhou J.M., and Xue Q.K. Phys. Rev. B 65 (2002) 233303
- (2002) Phys. Rev. B , vol.65 , pp. 233303
- Chen, H.¹ Li, Y.K.² Peng, C.S.³ Liu, H.F.⁴ Liu, Y.L.⁵ Huang, Q.⁶ Zhou, J.M.⁷ Xue, Q.K.⁸

11
- 0005058304
- De Wolf I. J. Raman Spectrosc. 30 (1999) 877
- (1999) J. Raman Spectrosc. , vol.30 , pp. 877
- De Wolf, I.¹

12
- 22844432802
- Tsang J.C., Mooney P.M., Dacol F., and Chu J.O. J. Appl. Phys. 75 (1994) 8098
- (1994) J. Appl. Phys. , vol.75 , pp. 8098
- Tsang, J.C.¹ Mooney, P.M.² Dacol, F.³ Chu, J.O.⁴

13
- 0038450159
- Langdo T.A., Currie M.T., Lochtefeld A., Hammond R., Carlin J.A., Erdtmann M., Braithwaite G., Yang V.K., Vineis C.J., Badawi H., and Bulsara M.T. Appl. Phys. Lett. 82 (2003) 4256
- (2003) Appl. Phys. Lett. , vol.82 , pp. 4256
- Langdo, T.A.¹ Currie, M.T.² Lochtefeld, A.³ Hammond, R.⁴ Carlin, J.A.⁵ Erdtmann, M.⁶ Braithwaite, G.⁷ Yang, V.K.⁸ Vineis, C.J.⁹ Badawi, H.¹⁰ Bulsara, M.T.¹¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.