The angular dependence of the sputtering yield of AG, NI and FE by high energy noble gas ions

Radiation Measurements

Volumn 27, Issue 4, 1997, Pages 569-574

  Wetz, P ^a   Kruger W ^a   Scharmann, A ^a   Schartner, K H ^a  

^a JUSTUS LIEBIG UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANGLE MEASUREMENT; ARGON; IONS; IRON; NICKEL; SILVER; XENON;

ANGULAR DEPENDENCE;

SPUTTERING;

EID: 0042046508     PISSN: 13504487     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1350-4487(97)00017-6     Document Type: Article

References (15)

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