Feedback-controlled ion beam sculpting apparatus

Review of Scientific Instruments

Volumn 75, Issue 4, 2004, Pages 900-905

  Stein, Derek M ^a,b   McMullan, Ciaran J ^c   Li, Jiali ^c,d   Golovchenko, Jene A ^c  

^a HARVARD UNIVERSITY   (United States)

^b DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c HARVARD UNIVERSITY   (United States)

^d UNIVERSITY OF ARKANSAS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ELECTRON GUNS; ELECTROSTATICS; FEEDBACK CONTROL; ION BEAMS; ION BOMBARDMENT; MEMBRANES; NANOSTRUCTURED MATERIALS; OPTICS; PARTICLE DETECTORS; TEMPERATURE; VACUUM APPLICATIONS;

ELECTROSTATIC ION OPTICS; ION BEAM SCULPTING APPARATUS; SOLID STATE MEMBRANE;

ION SOURCES;

EID: 2042443797     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1666986     Document Type: Article

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