Precision and accuracy in film stiffness measurement by Brillouin spectroscopy

Review of Scientific Instruments

Volumn 82, Issue 5, 2011, Pages

  Beghi, M G ^a   Di Fonzo, F ^b   Pietralunga, S ^a   Ubaldi, C ^a   Bottani, C E ^a  

^a POLITECNICO DI MILANO   (Italy)

^b ISTITUTO ITALIANO DI TECNOLOGIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BRILLOUIN SPECTROSCOPY; BULK MATERIALS; CONTACT LESS; ELASTIC CHARACTERIZATION; ELASTIC PROPERTIES OF THIN FILMS; EXPERIMENTAL SETUP; KEY FACTORS; NON-DESTRUCTIVE TECHNIQUE; OPTICAL CHARACTERIZATION; REFERENCE TECHNIQUE; STIFFNESS MEASUREMENTS; TRANSPARENT MATERIAL; WHOLE PROCESS;

BRILLOUIN SCATTERING; CHARACTERIZATION; SILICA; THIN FILMS;

ELASTIC MODULI;

EID: 79958063696     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3585980     Document Type: Article

References (50)

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