Complete thin film mechanical characterization using picosecond ultrasonics and nanostructured transducers: Experimental demonstration on SiO2

Applied Physics Letters

Volumn 93, Issue 7, 2008, Pages

  Mante, P A ^a   Robillard, J F ^a   Devos, A ^a  

^a INSTITUT D ELECTRONIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; ALUMINUM; NONMETALS; POISSON RATIO; SILICA; SILICATE MINERALS; SILICON; SILICON COMPOUNDS; THICK FILMS; THIN FILM DEVICES; THIN FILMS; TRANSDUCERS; ULTRASONIC TESTING; ULTRASONICS;

AL FILM; AL LAYER; HIGH FREQUENCIES; MECHANICAL CHARACTERIZATIONS; MECHANICAL MEASUREMENTS; NANO-STRUCTURED; PICO SECONDS; PICOSECOND ULTRASONICS; SILICA LAYERS; SUB-MICRON FILMS; SURFACE ACOUSTIC WAVES; ULTRASONIC TECHNIQUES; YOUNG'S MODULUS;

ULTRASONIC APPLICATIONS;

EID: 50249154013     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2975171     Document Type: Article

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