Exploitation of Brillouin spectroscopy for the characterization of a silica film

Sensor Letters

Volumn 6, Issue 1, 2008, Pages 130-136

  Signoriello, G ^a   Beghi, Marco G ^a  

^a POLITECNICO DI MILANO   (Italy)

Author keywords

Acoustic waves; Brillouin scattering; Elastic moduli; Thin films

Indexed keywords

ACOUSTIC PROPERTIES; ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; ACOUSTICS; BRILLOUIN SCATTERING; ELASTIC MODULI; ELASTIC WAVES; OPTICAL PROPERTIES; OXIDES; POISSON RATIO; REFRACTIVE INDEX; SCATTERING; SEMICONDUCTING SILICON COMPOUNDS; SILICA; THIN FILMS; ULTRASONIC TESTING; ULTRASONICS;

ACOUSTIC EXCITATIONS; ACOUSTIC MODES; BRILLOUIN SPECTROSCOPIES; BULK WAVES; ELASTIC PROPERTIES; LOCAL MEASUREMENTS; MEMS DESIGNS; POISSON'S RATIOS; SCATTERING GEOMETRIES; SILICA FILMS; SILICA LAYERS; SILICON SUBSTRATES; SPATIAL RESOLUTIONS; SURFACE ACOUSTIC WAVES; ULTRASONIC TECHNIQUES;

ACOUSTIC WAVE SCATTERING;

EID: 58049200461     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2008.014     Document Type: Conference Paper

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