Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing

Journal of Microelectromechanical Systems

Volumn 20, Issue 3, 2011, Pages 711-719

  Zhu, Yong ^a   Bazaei, Ali ^b   Moheimani, S O Reza ^b   Yuce, Mehmet Rasit ^b  

^a GRIFFITH UNIVERSITY   (Australia)

^b UNIVERSITY OF NEWCASTLE   (Australia)

Author keywords

Feedback control; microelectromechanical systems (MEMS); nanopositioning; thermal actuation; thermal position sensing

Indexed keywords

CLOSED-LOOP FEEDBACK CONTROL; DIFFERENTIAL MODE; ELECTRICAL RESISTANCES; ELECTROTHERMAL ACTUATION; FEED-FORWARD CONTROLLERS; FEEDBACK CONTROL METHODS; HEAT CONDUCTANCE; INPUT-OUTPUT CHARACTERISTICS; LOW FREQUENCY; MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROMACHINED; NANO-POSITIONER; NANO-POSITIONING; NONLINEAR STATICS; ON CHIPS; OPEN LOOPS; OPEN-LOOP CONTROL SYSTEMS; POSITION SENSORS; PROPORTIONAL INTEGRAL CONTROLLERS; REAL-TIME FEEDBACK; REFERENCE-TRACKING; ROBUST TRACKING; SENSING MECHANISM; SENSOR DRIFT; SETPOINTS; SILICON BEAMS; THERMAL ACTUATION; THERMAL POSITION SENSING; TRACKING PERFORMANCE;

ADAPTIVE CONTROL SYSTEMS; CLOSED LOOP SYSTEMS; FEEDBACK CONTROL; MEMS; MICROELECTROMECHANICAL DEVICES; NONLINEAR FEEDBACK; ROBUST CONTROL; SCANNING PROBE MICROSCOPY; SENSORS; THERMAL EXPANSION;

CONTROLLERS;

EID: 79958015916     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2011.2140358     Document Type: Article

References (26)

1. G. Binning and H. Rohrer, "The scanning tunneling microscope," Sci. Amer., vol. 253, pp. 50-56, 1986.
2. G. Binning, C. Quate, and C. Gerber, "Atomic force microscope," Phys. Rev. Lett., vol. 56, no. 9, pp. 930-933, Mar. 1986.
3. A. Pantazi, A. Sebastian, G. Cherubini, M. Lantz, H. Pozidis, H. Rothuizen, and E. Eleftheriou, "Control of MEMS-based scanningprobe data-storage devices," IEEE Trans. Nanotechnol., vol. 15, no. 5, pp. 824-841, Sep. 2007.
4. A. Pantazi, M. A. Lantz, G. Cherubini, H. Pozidis, and E. Eleftheriou, "A servomechanism for a micro-electro-mechanical-system-based scanningprobe data storage device," Nanotechonology, vol. 15, no. 10, pp. S612-S621, Oct. 2004.
5. Y. K. Yong, S. S. Aphale, and S. O. R.Moheimani, "Design, identification, and control of a flexure-based XY stage for fast nanoscale positioning," IEEE Trans. Nanotechnol., vol. 8, no. 1, pp. 46-54, Jan. 2009.
6. Y. K. Yong, S. S. Aphale, and S. O. R. Moheimani, "Atomic force microscopy with a 12-electrode piezoelectric tube scanner," Rev. Sci. Instrum., vol. 81, no. 3, p. 033701, Mar. 2010.
7. C. H. Kim and Y. K. Kim, "Micro XY -stage using silicon on a glass substrate," J. Micromech. Microeng., vol. 12, no. 2, pp. 103-107, Mar. 2002.
8. C. K. Pang, Y. Lu, J. Chen, H. Zhu, J. Yang, J. Mou, G. Guo, B. M. Chen, and T. H. Lee, "Design, fabrication, sensor fusion, and control of a micro X?Y stage media platform for probe-based storage systems," Mechatronics, vol. 19, no. 7, pp. 1158-1168, Oct. 2009.
9. S. Devasia, E. Eleftheriou, and S. O. R. Moheimani, "A survey of control issues in nanopositioning," IEEE Trans. Control Syst. Technol., vol. 15, no. 5, pp. 802-823, Sep. 2007.
10. A. Sebastian and D. Wiesmann, "Modeling and experimental identification of silicon microheater dynamics: A systems approach," J. Microelectromech. Syst., vol. 17, no. 4, pp. 911-920, Aug. 2008.
11. L. Gu, X. Li, H. Bao, B. Liu, Y. Wang, M. Liu, Z. Yang, and B. Cheng, "Single wafer processed nanopositioning XY -stage with trench-sidewall micromachining technology," J. Micromech. Microeng., vol. 16, no. 7, pp. 1349-1357, Jul. 2006.
12. C. S. B. Lee, S. Han, and N. C. MacDonald, "Single crystal silicon (SCS) XY -stage fabricated by DRIE and IR alignment," in Proc. IEEE MEMS, 2000, pp. 28-33.
13. J. J. Gorman, Y.-S. Kim, and N. G. Dagalakis, "Control of MEMS nanopositioners with nano-scale resolution," in Proc. IMECE, Chicago, IL, Nov. 5-10, 2006, IMECE-16190.
14. R. Hichey, D. Sameoto, T. Hubbard, and M. Kujath, "Time and frequency response of two-arm micromachined thermal actuators," J. Micromech. Microeng., vol. 13, no. 1, pp. 40-46, Jan. 2003.
15. Y. Sun, M. A. Greminger, D. P. Potasek, and B. J. Nelson, "A visually servoed MEMS manipulator," in Experimental Robotics VIII. Berlin, Germany: Springer-Verlag, 2003, pp. 255-264.
16. L. L. Chu and Y. B. Gianchandani, "A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing," J. Micromech. Microeng., vol. 13, no. 2, pp. 279-285, Mar. 2003.
17. M. A. Lantz, G. K. Binning, M. Despont, and U. Drechsler, "A micromechanical thermal displacement sensor with nanometre resolution," Nanotechnology, vol. 16, no. 8, pp. 1089-1094, Aug. 2005. (Pubitemid 40878605)
18. G. K. Binning, M. Despont, M. A. Lantz, and P. Vettiger, "Thermal Movement Sensor," U.S. Patent 7 186 019, Mar. 6, 2007.
19. N. B. Hubbard, M. L. Culpepper, and L. L. Howell, "Actuators for micropositioners and nanopositioners," Trans. ASME, vol. 59, no. 6, pp. 324-334, Nov. 2006. (Pubitemid 46132203)
20. A. Sebastian, A. Pantazi, S. O. R. Moheimani, H. Pozidis, and E. Eleftheriou, "Achieving subnanometer precision in a MEMS-based storage device during self-servo write process," IEEE Tran. Nanotechnology, vol. 7, no. 5, pp. 586-595, Sep. 2008.
21. M. A. Lantz, H. E. Rothuizen, U. Drechsler,W. Haberle, and M. Despont, "A vibration resistant nanopositioner for mobile parallel-probe strorage applications," J. Microelectromech. Syst., vol. 16, no. 1, pp. 130-139, Feb. 2007. (Pubitemid 46431413)
22. V. Kaajakari, Practical MEMS. Las Vegas, NV: Small Gear Publ., 2009.
23. SOIMUMPs Design Handbook, Revision 7.0, 2011. [Online]. Available: http://www.memscap.com/en-mumps.html
24. Software Manual, Planar Motion Analyzer Software 2.3, Polytec, Irvine, CA, 2008.
25. U. Durig, "Fundamentals of micromechanical thermoelectric sensors," J. Appl. Phys., vol. 98, no. 4, p. 044 906, 2005.
26. C. D. Lott, T. W. McLain, J. N. Harb, and L. L. Howell, "Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator," Sens. Actuators A, Phys., vol. 101, no. 1/2, pp. 239-250, Sep. 2002.