Self-assembly technique for MEMS vertical comb electrostatic actuator

ieice electronics express

Volumn 2, Issue 9, 2005, Pages 311-315

  Isamoto, K ^a   Makino, T ^a   Moroswa, A ^a   Chong, C ^a   Fujita, H ^b   Toshiyoshi, H ^b  

^a Santec Co   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

process stiction; self alignment; self assembly; vertical comb

Indexed keywords

EID: 85009563308     PISSN: 13492543     EISSN: None     Source Type: Journal    
DOI: 10.1587/elex.2.311     Document Type: Article

References (6)

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