Microfabricated torsional actuators using self-aligned plastic deformation of silicon

Journal of Microelectromechanical Systems

Volumn 15, Issue 3, 2006, Pages 553-562

  Kim, Jongbaeg ^a   Choo, Hyuck ^b   Lin, Liwei ^b   Muller, Richard S ^b  

^a Yonsei University   (South Korea)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electrostatic actuators; Plastic deformation; Scanning micromirrors; Self alignment; Torsional actuators; Vertically interdigitated combs

Indexed keywords

DEGRADATION; ELECTROSTATIC ACTUATORS; MICROELECTROMECHANICAL DEVICES; PLASTIC DEFORMATION; SILICON; SINGLE CRYSTALS; TORSIONAL STRESS;

SCANNING MICROMIRRORS; SELF-ALIGNMENT; TORSIONAL ACTUATORS; VERTICALLY INTERDIGITATED COMBS;

MICROACTUATORS;

EID: 33745124698     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.876789     Document Type: Article

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