Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD

Surface and Coatings Technology

Volumn 206, Issue 4, 2011, Pages 623-629

  Bewilogua, Klaus ^a   Bialuch, Ingmar ^a   Ruske, Hartmut ^a   Weigel, Kai ^a  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

Author keywords

Diamond like carbon; Friction; Multilayers; Plasma CVD; Surface energy; Wear

Indexed keywords

CARBON-BASED; COATING DEPOSITION; COATING THICKNESS; DIAMOND-LIKE CARBON; DUPLEX PROCESS; FRICTION COEFFICIENTS; HARDNESS VALUES; HEXAMETHYL DISILOXANE; INDENTATION HARDNESS; MORPHOLOGY AND COMPOSITION; MULTI-LAYER-COATING; MULTILAYER DESIGNS; PLASMA ASSISTED CHEMICAL VAPOR DEPOSITION; PLASMA CVD; PLASMA NITRIDING; PRE-TREATMENT; SINGLE LAYER; SURFACE ENERGIES; TEST CONDITION; TETRAMETHYLSILANE; WEAR RATES; WETTING BEHAVIOR; WORKING PRESSURES;

ANGLE MEASUREMENT; CHEMICAL VAPOR DEPOSITION; COLD WORKING; CONTACT ANGLE; FRICTION; HARDNESS; METHANE; MULTILAYERS; NITRIDING; NITROGEN PLASMA; PHYSICAL VAPOR DEPOSITION; PLASMA DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICON; SURFACE CHEMISTRY; THICKNESS MEASUREMENT; TRIBOLOGY;

ABRASIVE COATINGS;

EID: 79957489015     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.02.020     Document Type: Article

References (32)

1. Klages C.-P., Memming R. Mater. Sci. Forum 1989, 52&53:609.
2. Grischke M., Bewilogua K., Trojan K., Dimigen H. Surf. Coat. Technol. 1995, 74-75:739.
3. Donnet C. Surf. Coat. Technol. 1998, 100-101:180.
4. Sánchez-López J.C., Fernández A. Doping and Alloying Effects on DLC Coatings. Tribology of Diamond-Like Carbon Films 2008, 311. Springer Science + Business Media, LLC, New York. C. Donnet, A. Erdemir (Eds.).
5. Bauer C., Leiste H., Stüber M., Ulrich S., Holleck H. Mat.-Wiss. U. Werkstofftech. 2003, 34:912.
6. Oguri K., Arai T. Thin Solid Films 1992, 208:158.
7. Meneve J., Dekempener E., Smeets J. Diamond Films Technol. 1994, 4:23.
8. Grischke M., Hieke A., Morgenweck F., Dimigen H. Diamond Relat. Mater. 1998, 7:454.
9. Trojan K., Grischke M., Dimigen H. Phys. Status Solidi A 1994, 145:575.
10. Kulinich S.A., Farzaneh M. Vacuum 2005, 79:255.
11. Hieke A. Vak. Forsch. Prax. 2001, 13:9.
12. Augustin W., Zhang J., Bialuch I., Geddert T., Scholl S. Proc. Fifth Int. Conf. on Enhanced, Compact and Ultra-Compact Heat Exchangers: Science, Engineering and Technology. Engineering Conferences International, Hoboken, NJ September 2005, 394. R.K. Shah, M. Ishizuka, T.M. Rudy, V.V. Wadekar (Eds.).
13. Michler T., Grischke M., Bewilogua K., Hieke A. Surf. Coat. Technol. 1999, 111:41.
14. Meneve J., Dekempeneer E., Wegener W., Smeets J. Surf. Coat. Technol. 1996, 86-87:617.
15. Dekempeneer E., Van Acker K., Vercammen K., Meneve J., Neerinck D., Eufinger S., Pappaer W., Sercu M., Smeets J. Surf. Coat. Technol. 2001, 142-144:669.
16. Bertran E., Martínez E., Viera G., Farjas J., Roura P. Diamond Relat. Mater. 2001, 10:1115.
17. Chouquet C., Ducros C., Barrat S., Billard A., Sanchette F. Surf. Coat. Technol. 2008, 203:745.
18. Zhang W., Tanaka A., Xu B.S., Koga Y. Diamond Relat. Mater. 2005, 14:1361.
19. Knoblauch-Meyer L., Hauert R. Thin Solid Films 1999, 338:172.
20. Willich P., Steinberg C. Appl. Surf. Sci. 2001, 179:263.
21. Michler T., Siebert C. Surf. Coat. Technol. 2003, 163-164:546.
22. Taube K. Surf. Coat. Technol. 1998, 98:976.
23. Bewilogua K., Cooper C.V., Specht C., Schröder J., Wittorf R., Grischke M. Surf. Coat. Technol. 2000, 127:224.
24. Järrendahl K., Ivanov I., Sundgren J.-E., Radnóczi G., Czigany Zs., Greene J. J. Mater. Res. 1997, 12:1806.
25. Miyagawa Y., Nakadate H., Ikeyama M., Nakao S., Miyagawa S. Diamond Relat. Mater. 2003, 12:927.
26. Bewilogua K., Wittorf R., Thomsen H., Weber M. Thin Solid Films 2004, 447-448:142.
27. Logothetidis S., Kassavetis S., Charitidis C., Panayiotatos Y., Laskarakis A. Carbon 2004, 42:1133.
28. Gupta P., Meletis E.I. Tribol. Int. 2004, 37:1031.
29. Holmberg K. Surf. Coat. Technol. 1992, 56:1.
30. Erdemir A., Donnet C. Modern Tribology Handbook 2001, Vol. II:871. CRC Press, Boca Raton. B. Bhushan (Ed.).
31. Forsich C., Heim D., Müller T. Surf. Coat. Technol. 2008, 203:521.
32. Meine K., Schneider T., Spaltmann D., Santer E. Wear 2002, 253:733.