Nanoindentation studies of multilayer amorphous carbon films

Carbon

Volumn 42, Issue 5-6, 2004, Pages 1133-1136

  Logothetidis, S ^a   Kassavetis, S ^a   Charitidis, C ^a   Panayiotatos, Y ^a   Laskarakis, A ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

Author keywords

A. Amorphous carbon, Multilayer; D. Hardness, Substrate effect

Indexed keywords

CARBON; CHEMICAL BONDS; ELASTIC MODULI; ELLIPSOMETRY; HARDNESS; MULTILAYERS; STIFFNESS; SUBSTRATES;

AMORPHOUS CARBON; NANOINDENTATION; SPECTROSCOPIC ELLIPSOMETRY; SUBSTRATE EFFECTS;

AMORPHOUS FILMS;

EID: 2342451999     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2003.12.054     Document Type: Conference Paper

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