Influence of the deposition temperature on mechanical and tribological properties of a-C:H:Si coatings on nitrided and postoxidized steel deposited by DC-PACVD

Surface and Coatings Technology

Volumn 203, Issue 5-7, 2008, Pages 521-525

  Forsich, Christian ^a   Heim, Daniel ^a   Mueller, Thomas ^b  

^a UNIVERSITY OF APPLIED SCIENCES UPPER AUSTRIA   (Austria)

^b Ruebig GmbH   (Austria)

Author keywords

a C:H:Si; PACVD; Plasma nitriding; Postoxidation; Temperature dependence

Indexed keywords

AMORPHOUS CARBON; AMORPHOUS SILICON; CORROSION RESISTANCE; DEPOSITION; FRICTION; HARDNESS; MACHINERY; MECHANICAL PROPERTIES; NITRIDING; PHOTODEGRADATION; PLASMA APPLICATIONS; PLASMA DEPOSITION; PLASMA DIAGNOSTICS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMAS; SILICON; STEEL; SURFACE CHEMISTRY; SURFACE TENSION; SURFACE TREATMENT; TRIBOLOGY; WEAR RESISTANCE; X RAY ANALYSIS;

A-C:H:SI; PACVD; PLASMA NITRIDING; POSTOXIDATION; TEMPERATURE DEPENDENCE;

CARBON FILMS;

EID: 55749089572     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.05.044     Document Type: Article

References (23)

1. Damasceno J.C., Camargo Jr. S.S., Freire Jr. F.L., and Carius R. Surf. Coat. Technol. 133 (2000) 247
2. Ohana T., Nakamura T., Suzuki M., Tanaka A., and Koga Y. Diamond Relat. Mater. 13 (2004) 1500
3. Ogwu A.A., Coyle T., Okpalugo T.I.T., Kearney P., Maguire P.D., and McLaughlin J.A.D. Acta Mater. 51 (2003) 3455
4. Bendavid A., Martin P.J., Comte C., Preston E.W., Haq A.J., Magdon Ismail F.S., and Singh R.K. Diamond Relat. Mater. 16 (2007) 1616
5. Baia Neto A.L., Santos R.A., Freire Jr. F.L., Camargo Jr. S.S., Carius R., Finger F., and Beyer W. Thin Solid Films 293 (1997) 206
6. Baia Neto A.L., Camargo Jr. S.S., Carius R., Finger F., and Beyer W. Surf. Coat. Technol. 120-121 (1999) 395
7. Wu W.-J., and Hon M.-H. Thin Solid Films 345 (1999) 200
8. Michler J., Tobler M., and Blank E. Diamond Relat. Mater. 8 (1999) 510
9. Camargo Jr. S.S., Baia Neto A.L., Santos R.A., Freire Jr. F.L., Carius R., and Finger F. Diamond Relat. Mater. 7 (1998) 1155
10. Camargo Jr. S.S., Santos R.A., Baia Neto A.L., Carius R., and Finger F. Thin Solid Films 332 (1998) 130
11. Brand J., Gadow R., and Killinger A. Surf. Coat. Technol. 180-181 (2004) 213
12. Bell T., Dong H., and Sun Y. Tribol. Int. 31 (1998) 127
13. Mueller T., Gebeshuber A., Kullmer R., Lugmair C., Perlot S., and Stoiber M. Mater. Technol. 38 (2004) 353
14. Lee I. Surf. Coat. Technol. 188-189 (2004) 669
15. Wu W.J., and Hon M.H. Thin Solid Films 307 (1997) 1
16. Heinke W., Leyland A., Matthews A., Berg G., Friedrich C., and Broszeit E. Thin Solid Films 270 (1995) 431
17. Spies H.J., Larisch B., and Hoeck K. Surf. Eng. 11 (1995) 319
18. Spies H.J., Larisch B., Hoeck K., Broszeit E., and Schröder H.J. Surf. Coat. Technol. 74-75 (1995) 178
19. Baek W.S., Kwon S.C., Lee S.R., Rha J.J., Nam K.S., and Lee J.Y. Surf. Coat. Technol 114 (1999) 94
20. Michler T., Grischke M., Bewilogua K., and Hieke A. Surf. Coat. Technol. 111 (1999) 41
21. Choi J., Nakao S., Miyagawa S., Ikeyama M., and Miyagawa Y. Surf. Coat. Technol. 201 (2007) 8357
22. Wu X., Suzuki M., Ohana T., and Tanaka A. Diamond Relat. Mater. 17 (2008) 7
23. Nakanishi K., Mori H., Tachikawa H., Itou K., Fujioka M., and Funaki Y. Surf. Coat. Technol. 200 (2006) 4277