Constitution, microstructure, mechanical properties, and performance of magnetron-sputtered carbon films with additions of silicon

Materialwissenschaft und Werkstofftechnik

Volumn 34, Issue 10-11, 2003, Pages 912-918

  Bauer, Christiane ^a   Leiste, H ^b   Stussber M ^b   Ulrich, S ^b   Holleck, H ^b  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b NONE

Author keywords

Amorphous Carbon; PACS 61.43.Er 62.20.Qp 81.05.Uw 81.15.Cd 81.70.Bt Magnetron Sputtering; Pin on disc; Silicon

Indexed keywords

ARGON; ELASTIC MODULI; FRICTION; ION BOMBARDMENT; MAGNETRON SPUTTERING; MICROSTRUCTURE; SILICON; SUBSTRATES; TUNGSTEN;

AMORPHOUS CARBON FILMS;

CARBON;

EID: 0242334683     PISSN: 09335137     EISSN: None     Source Type: Journal    
DOI: 10.1002/mawe.200300677     Document Type: Article

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