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Volumn 111, Issue 1, 1999, Pages 41-45
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Continuously deposited duplex coatings consisting of plasma nitriding and a-C:H:Si deposition
a,b
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Author keywords
a C:H:Si deposition; Duplex coatings; Plasma nitriding
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Indexed keywords
ADHESION;
ELASTIC MODULI;
FRICTION;
NITRIDING;
PHYSICAL VAPOR DEPOSITION;
PLASMA APPLICATIONS;
PRESSURE EFFECTS;
PROTECTIVE COATINGS;
WEAR RESISTANCE;
CHEMICAL VAPOR DEPOSITION;
DIAMOND FILMS;
HARDNESS;
PLASMAS;
STEEL;
TRIBOLOGY;
FRICTION COEFFICIENT;
PLASMA NITRIDING;
TETRAMETHYLSILANE;
DIAMOND LIKE CARBON FILM;
DUPLEX COATING;
DIAMOND LIKE CARBON FILMS;
COATINGS;
COATING;
DEPOSITION;
NITRIDING;
PLASMA TREATMENT;
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EID: 0032715862
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(98)00701-4 Document Type: Article |
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Times cited : (35)
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References (19)
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