Low friction and wear resistant a-C:H/a-Si1-xCx:H multilayer coatings

Surface and Coatings Technology

Volumn 86-87, Issue PART 2, 1996, Pages 617-621

  Meneve, J ^a   Dekempeneer, E ^a   Wegener, W ^a   Smeets, J ^a  

^a Materials Technology   (Belgium)

Author keywords

a C:H a Si1 xCx:H multilayer coating; Low friction coating; R.f. Plasma assisted chemical vapour deposition; Wear resistance

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; EXPERIMENTS; MULTILAYERS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON ALLOYS; WEAR RESISTANCE;

CHEMICAL VAPOR; LOW FRICTION COATING; MULTILAYER COATING;

PROTECTIVE COATINGS;

COATINGS; FRICTION; WEAR RESISTANCE;

EID: 0006079153     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)02998-2     Document Type: Article

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