Atomic force microscope cantilever as an encoding sensor for real-time displacement measurement

Measurement Science and Technology

Volumn 21, Issue 10, 2010, Pages

  Chen, Xiaomei ^a,b   Koenders, Ludger ^a   Wolff, Helmut ^a   Haertig, Frank ^a   Schilling, Meinhard ^b  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Atomic force microscope (AFM); Displacement measurement; Encoding principle; Tuning fork sensor

Indexed keywords

ATOMIC FORCE MICROSCOPY; ENCODING (SYMBOLS); MICROSCOPES; NANOCANTILEVERS; SIGNAL PROCESSING; TUNING;

ATOMIC FORCE MICROSCOPE CANTILEVERS; CAPACITANCE SENSORS; CLOSED LOOP MODE; CROSS CORRELATION TECHNIQUES; REAL TIME SIGNAL; SINUSOIDAL GRATING; SINUSOIDAL WAVEFORMS; TUNING FORKS;

DISPLACEMENT MEASUREMENT;

EID: 78149293290     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/21/10/105205     Document Type: Article

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