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Volumn 81, Issue 3, 2010, Pages

Study of sensitivity and noise in the piezoelectric self-sensing and self-actuating cantilever with an integrated Wheatstone bridge circuit

(5) Shin, Chaeho a Jeon, Insu a Khim, Zheong G a Hong, J W b Nam, Hyojin c

a Seoul National University (South Korea)

b NanoFocus Incorporated (South Korea)

c LG Electronics Inc (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE; DETECTION METHODS; EXTERNAL SENSORS; HIGH-SPEED SCANNING SYSTEM; LEAD-ZIRCONATE-TITANATE FILMS; LOW TEMPERATURES; MEASUREMENT RESULTS; MINIMUM DETECTABLE DEFLECTIONS; NOISE LEVELS; PZT; SELF-SENSING; SELF-SENSING AND SELF-ACTUATING; SELF-SENSING CANTILEVERS; SENSOR SENSITIVITY; SIGNAL TO NOISE; SIMPLE STRUCTURES; SYSTEM INTEGRATION; WHEATSTONE BRIDGE CIRCUITS; ZNO FILMS;

BRIDGE CIRCUITS; ELECTRIC CONVERTERS; ELECTRIC NETWORK ANALYSIS; METALLIC FILMS; NANOCANTILEVERS; OPTICAL FIBERS; PIEZOELECTRIC ACTUATORS; PIEZOELECTRIC MATERIALS; RESISTORS; SEMICONDUCTING LEAD COMPOUNDS; SENSORS; ZINC OXIDE;

ATOMIC FORCE MICROSCOPY;

EID: 77950562580 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3327822 Document Type: Article

Times cited : (18)

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