Micro-motion analyzer used for dynamic MEMS characterization

Optics and Lasers in Engineering

Volumn 47, Issue 3-4, 2009, Pages 512-517

  Guo, Tong ^a   Chang, Hong ^a   Chen, Jinping ^a   Fu, Xing ^a   Hu, Xiaotang ^a  

^a TIANJIN UNIVERSITY   (China)

Author keywords

Computer microvision; Dynamic behavior; Microelectromechanical systems (MEMS); Phase shifting interferometry; Strobed illumination

Indexed keywords

COMPOSITE MICROMECHANICS; COMPUTER CONTROL SYSTEMS; ELECTROMECHANICAL DEVICES; INTEGRATED OPTICS; INTERFEROMETERS; INTERFEROMETRY; MEASUREMENTS; MECHATRONICS; MEMS; MICROMECHANICS; OPTOELECTRONIC DEVICES; PHASE SHIFT; POLYSILICON;

COMPUTER MICROVISION; DYNAMIC BEHAVIOR; MICROELECTROMECHANICAL SYSTEMS (MEMS); PHASE-SHIFTING INTERFEROMETRY; STROBED ILLUMINATION;

MICROELECTROMECHANICAL DEVICES;

EID: 59349106452     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2008.09.006     Document Type: Article

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