Developmental long-trace profiler using optimally aligned mirror-based pentaprism

Optical Engineering

Volumn 50, Issue 5, 2011, Pages

  Barber, Samuel K ^a   Morrison, Gregory Y ^a   Yashchuk, Valeriy V ^a   Gubarev, Mikhail V ^b   Geckeler, Ralf D ^c   Buchheim, Jana ^d   Siewert, Frank ^d   Zeschke, Thomas ^d  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b NASA MARSHALL SPACE FLIGHT CENTER   (United States)

^c PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

^d HAHN MEITNER INSTITUT   (Germany)

Author keywords

alignment; deflectometry; developmental long trace profilers; long trace profilers; mirror based pentaprism; optical metrology; pentaprism; surface profilometer; surface slope metrology

Indexed keywords

DEFLECTOMETRY; LONG-TRACE PROFILERS; OPTICAL METROLOGY; PENTAPRISM; SURFACE PROFILOMETER; SURFACE SLOPE METROLOGY; TRACE PROFILER;

ALIGNMENT; COMMUNICATION CHANNELS (INFORMATION THEORY); INSTRUMENTS; LIGHT SOURCES; MIRRORS; PRISMS; PROFILOMETRY; SURFACES; SYSTEMATIC ERRORS; UNITS OF MEASUREMENT;

OPTICAL TESTING;

EID: 79955656365     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.3572113     Document Type: Article

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