메뉴 건너뛰기




Volumn 5921, Issue , 2005, Pages 1-12

First report on a European Round Robin for slope measuring profilers

Author keywords

Cross comparison; LTP; Metrology; Optical surface; Standard reference

Indexed keywords

ERROR ANALYSIS; FUSED SILICA; NEUTRONS; SILICON; X RAY OPTICS;

EID: 31844436116     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.621087     Document Type: Conference Paper
Times cited : (19)

References (16)
  • 2
    • 31844449168 scopus 로고    scopus 로고
    • http://www.synchrotron-soleil.fr/anglais/science-and-users/optics/cost/
  • 3
    • 0038640590 scopus 로고    scopus 로고
    • The present state of Kirkpatrick-Baez mirror systems at the ESRF
    • Yves Dabin, Gérard Rostaing, Olivier Hignette, Amparo Rommeveaux, Andreas Freund, The present state of Kirkpatrick-Baez mirror systems at the ESRF, Proceedings SPIE, 2002, Volume 4789, pp. 235-245
    • (2002) Proceedings SPIE , vol.4789 , pp. 235-245
    • Dabin, Y.1    Rostaing, G.2    Hignette, O.3    Rommeveaux, A.4    Freund, A.5
  • 4
    • 31844433838 scopus 로고    scopus 로고
    • Mirror metrology and bender characterization at ESRF
    • this conference
    • Amparo Rommeveaux, Olivier Hignette, Christian Morawe, Mirror metrology and bender characterization at ESRF, SPIE's Proc. this conference
    • SPIE's Proc.
    • Rommeveaux, A.1    Hignette, O.2    Morawe, C.3
  • 5
    • 20644452021 scopus 로고    scopus 로고
    • Efficient sub 100 nm focusing of hard X rays
    • Olivier Hignette, Peter Cloetens, Gérard Rostaing, Efficient sub 100 nm focusing of hard X rays, Rev. Sci. Inst. 76, 063709, 2005
    • (2005) Rev. Sci. Inst. , vol.76 , pp. 063709
    • Hignette, O.1    Cloetens, P.2    Rostaing, G.3
  • 6
    • 58749083734 scopus 로고    scopus 로고
    • Status of the optical metrology at the ESRF
    • Olivier Hignette, Amparo Rommeveaux, Status of the optical metrology at the ESRF, Proceedings SPIE, 1996, Volume 2856, pp. 314-322
    • (1996) Proceedings SPIE , vol.2856 , pp. 314-322
    • Hignette, O.1    Rommeveaux, A.2
  • 7
    • 31844440971 scopus 로고    scopus 로고
    • New results in metrology with LTP at SOLEIL synchrotron
    • this conference
    • Muriel Thomasset, Sylvain Brochet, François Polack, New results in metrology with LTP at SOLEIL synchrotron, SPIE's Proc. this conference
    • SPIE's Proc.
    • Thomasset, M.1    Brochet, S.2    Polack, F.3
  • 8
    • 31844436193 scopus 로고
    • The optical metrology laboratory of sinchrotrone Trieste
    • S.N.Qian, G. Sostero, W.Jark, The optical metrology laboratory of sinchrotrone Trieste, Synchrotron Radiation News, 8, No.6,7-9, 1995
    • (1995) Synchrotron Radiation News , vol.8 , Issue.6 , pp. 7-9
    • Qian, S.N.1    Sostero, G.2    Jark, W.3
  • 9
    • 0000637816 scopus 로고
    • The penta-prism LTP: A long-trace-profile with stationary optical head and moving penta-prism
    • S.N.Qian, W.Jark, P.Z. Takacs, The penta-prism LTP: A long-trace-profile with stationary optical head and moving penta-prism, Rev. Sci. Instrum., 66 (3),2562-2569, 1995
    • (1995) Rev. Sci. Instrum. , vol.66 , Issue.3 , pp. 2562-2569
    • Qian, S.N.1    Jark, W.2    Takacs, P.Z.3
  • 10
    • 77950850815 scopus 로고    scopus 로고
    • The nanometer optical component measuring machine: A new Sub-nm topography measuring device for X-rax optics at BESSY
    • Mellville, New York
    • Frank Siewert, Tino Noll, Thomas Schlegel, Thomas Zeschke and Heiner Lammert, The Nanometer Optical Component Measuring Machine: a new Sub-nm Topography Measuring Device for X-rax Optics at BESSY, Mellville, New York, 2004, AIP Conference Proceedings, Volume 705, p. 847-850
    • (2004) AIP Conference Proceedings , vol.705 , pp. 847-850
    • Siewert, F.1    Noll, T.2    Schlegel, T.3    Zeschke, T.4    Lammert, H.5
  • 13
    • 0033888254 scopus 로고    scopus 로고
    • Precision calibration and systematic error reduction in the long trace profiler
    • S.N.Qian, G. Sostero, P.Z. Takacs, Precision calibration and systematic error reduction in the long trace profiler, Opt. Eng. 39(1) n 304-310, 2000
    • (2000) Opt. Eng. , vol.39 , Issue.1
    • Qian, S.N.1    Sostero, G.2    Takacs, P.Z.3
  • 14
    • 0035760597 scopus 로고    scopus 로고
    • Use and traceable calibration of autocollimators for ultra-precise measurement of slope and topography
    • R.Geckeler, I. Weingärtner, A. Just, R. Probst, Use and traceable calibration of autocollimators for ultra-precise measurement of slope and topography. Proceedings SPIE, Volume 4401, 184, 2001
    • (2001) Proceedings SPIE , vol.4401 , pp. 184
    • Geckeler, R.1    Weingärtner, I.2    Just, A.3    Probst, R.4
  • 15
    • 0005336072 scopus 로고
    • Angle calibration of the long trace profiler using a diffraction grating
    • LSBL-160, 26 August
    • Steve Irick, Angle calibration of the long trace profiler using a diffraction grating, LBNL ALS Beamline Note, LSBL-160, 26 August, 1992
    • (1992) LBNL ALS Beamline Note
    • Irick, S.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.