SCOPUS 정보 검색 플랫폼

Applied Surface Science

Volumn 257, Issue 16, 2011, Pages 7061-7064

Rapid thermal annealing of ITO films

(6) Song, Shumei a Yang, Tianlin a Liu, Jingjing a Xin, Yanqing a Li, Yanhui a Han, Shenghao a,b

a SHANDONG UNIVERSITY (China)

b SHANDONG UNIVERSITY (China)

Author keywords

ITO film; Rapid thermal annealing; Resistivity; Transmittance

Indexed keywords

ELECTRIC CONDUCTIVITY; INDIUM COMPOUNDS; ITO GLASS; OPTICAL PROPERTIES; SUBSTRATES; TIN OXIDES;

DC MAGNETRON SPUTTERING; EFFECT OF ANNEALING; ELECTRICAL AND OPTICAL PROPERTIES; ITO FILMS; RAPID THERMAL ANNEALING (RTA); TEMPERATURE INCREASE; TIN DOPED INDIUM OXIDE; TRANSMITTANCE;

RAPID THERMAL ANNEALING;

EID: 79955587632 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2011.03.009 Document Type: Article

Times cited : (111)

References (26)

1
- 33646487911
- U. Betza, M.K. Olsson, J. Marthy, and F. Atamny Surf. Coat. Technol. 200 2006 5751 5759
- (2006) Surf. Coat. Technol. , vol.200 , pp. 5751-5759
- Betza, U.¹ Olsson, M.K.² Marthy, J.³ Atamny, F.⁴

2
- 77955518761
- V.A. Dao, H. Choi, J. Heo, H. Park, K. Yoon, Y. Lee, Y. Kim, N. Lakshminarayan, and J. Yi Curr. Appl. Phys. 10 2010 S506 S509
- (2010) Curr. Appl. Phys. , vol.10
- Dao, V.A.¹ Choi, H.² Heo, J.³ Park, H.⁴ Yoon, K.⁵ Lee, Y.⁶ Kim, Y.⁷ Lakshminarayan, N.⁸ Yi, J.⁹

3
- 43049153373
- L.Y. Yang, X.Z. Chen, H. Xu, D.Q. Ye, H. Tian, and S.G. Yin Appl. Surf. Sci. 254 2008 5055 5060
- (2008) Appl. Surf. Sci. , vol.254 , pp. 5055-5060
- Yang, L.Y.¹ Chen, X.Z.² Xu, H.³ Ye, D.Q.⁴ Tian, H.⁵ Yin, S.G.⁶

4
- 27744581499
- H. Han, D. Adams, J.W. Mayer, and T.L. Alford J. Appl. Phys. 98 2005 1 8 083705
- (2005) J. Appl. Phys. , vol.98 , pp. 1-8
- Han, H.¹ Adams, D.² Mayer, J.W.³ Alford, T.L.⁴

5
- 79251595179
- K.J. Kumar, N.R.C. Raju, and A. Subrahmanyam Appl. Surf. Sci. 257 2011 3075 3080
- (2011) Appl. Surf. Sci. , vol.257 , pp. 3075-3080
- Kumar, K.J.¹ Raju, N.R.C.² Subrahmanyam, A.³

6
- 38649123368
- C.H. Yang, S.C. Lee, T.C. Lin, and S.C. Chen Thin Solid Films 516 2008 1984 1991
- (2008) Thin Solid Films , vol.516 , pp. 1984-1991
- Yang, C.H.¹ Lee, S.C.² Lin, T.C.³ Chen, S.C.⁴

7
- 77949324824
- N. Wan, T. Wang, H.C. Sun, G. Chen, L. Geng, X.H. Gan, S.H. Guo, J. Xu, L. Xu, and K.J. Chen J. Non-Cryst. Solids 356 2010 911 916
- (2010) J. Non-Cryst. Solids , vol.356 , pp. 911-916
- Wan, N.¹ Wang, T.² Sun, H.C.³ Chen, G.⁴ Geng, L.⁵ Gan, X.H.⁶ Guo, S.H.⁷ Xu, J.⁸ Xu, L.⁹ Chen, K.J.¹⁰

8
- 62549128209
- T. Kondo, Y. Sawada, H. Funakubo, K. Akiyama, T. Kiguchi, M.H. Wang, and T. Uchida Electrochem. Solid-State Lett. 12 2009 D42 D44
- (2009) Electrochem. Solid-State Lett. , vol.12
- Kondo, T.¹ Sawada, Y.² Funakubo, H.³ Akiyama, K.⁴ Kiguchi, T.⁵ Wang, M.H.⁶ Uchida, T.⁷

9
- 76049105034
- K.A. Sierros, D.R. Cairns, J.S. Abell, and S.N. Kukureka Thin Solid Films 518 2010 2623 2627
- (2010) Thin Solid Films , vol.518 , pp. 2623-2627
- Sierros, K.A.¹ Cairns, D.R.² Abell, J.S.³ Kukureka, S.N.⁴

10
- 55849119199
- G.S. Belo, B.J.P. da Silva, E.A. de Vasconcelos, W.M. de Azevedo, and E.F. da Silva Jr. Appl. Surf. Sci. 255 2008 755 757
- (2008) Appl. Surf. Sci. , vol.255 , pp. 755-757
- Belo, G.S.¹ Da Silva, B.J.P.² De Vasconcelos, E.A.³ De Azevedo, W.M.⁴ Da Silva Jr., E.F.⁵

11
- 0003759821
- Institute of Physics Philadelphia
- H.L. Hartnagel, A.L. Dawar, A.K. Jain, and C. Jagadsik Semiconducting Transparent Thin Films 1995 Institute of Physics Philadelphia p. 91
- (1995) Semiconducting Transparent Thin Films
- Hartnagel, H.L.¹ Dawar, A.L.² Jain, A.K.³ Jagadsik, C.⁴

12
- 0033896873
- H. Morikawa, and M. Fujita Thin Solid Films 359 2000 61 67
- (2000) Thin Solid Films , vol.359 , pp. 61-67
- Morikawa, H.¹ Fujita, M.²

13
- 2942522858
- Y.L. Hu, X.G. Diao, C. Wang, W.C. Hao, and T.M. Wang Vacuum 75 2004 183 188
- (2004) Vacuum , vol.75 , pp. 183-188
- Hu, Y.L.¹ Diao, X.G.² Wang, C.³ Hao, W.C.⁴ Wang, T.M.⁵

14
- 0034500616
- R. Singh, M. Fakhruddin, and K.F. Poole Appl. Surf. Sci. 168 2000 198 203
- (2000) Appl. Surf. Sci. , vol.168 , pp. 198-203
- Singh, R.¹ Fakhruddin, M.² Poole, K.F.³

15
- 0036574570
- T.Y. Ma, and D.K. Shim Thin Solid Films 410 2002 8 13
- (2002) Thin Solid Films , vol.410 , pp. 8-13
- Ma, T.Y.¹ Shim, D.K.²

16
- 0032046806
- P.K. Song, Y. Shigesato, I. Yasui, C.W. Ow-Yang, and D.C. Paine Jpn. J. Appl. Phys. 37 1998 1870 1896
- (1998) Jpn. J. Appl. Phys. , vol.37 , pp. 1870-1896
- Song, P.K.¹ Shigesato, Y.² Yasui, I.³ Ow-Yang, C.W.⁴ Paine, D.C.⁵

17
- 0029485323
- T. Minami, H. Sonohara, T. Kakumu, and S. Takata Thin Solid Films 270 1995 37 42
- (1995) Thin Solid Films , vol.270 , pp. 37-42
- Minami, T.¹ Sonohara, H.² Kakumu, T.³ Takata, S.⁴

18
- 58149467487
- R. Balasundaraprabhu, E.V. Monakhov, N. Muthukumarasamy, O. Nilsen, and B.G. Svensson Mater. Chem. Phys. 114 2009 425 429
- (2009) Mater. Chem. Phys. , vol.114 , pp. 425-429
- Balasundaraprabhu, R.¹ Monakhov, E.V.² Muthukumarasamy, N.³ Nilsen, O.⁴ Svensson, B.G.⁵

19
- 33847021888
- H.R. Fallah, M. Ghasemi, A. Hassanzadeh, and H. Steki Mater. Res. Bull. 42 2007 487 496
- (2007) Mater. Res. Bull. , vol.42 , pp. 487-496
- Fallah, H.R.¹ Ghasemi, M.² Hassanzadeh, A.³ Steki, H.⁴

20
- 0034292449
- J. George, and C.S. Menon Surf. Coat. Technol. 132 2000 45 48
- (2000) Surf. Coat. Technol. , vol.132 , pp. 45-48
- George, J.¹ Menon, C.S.²

21
- 11344285994
- D.F. Lii, J.L. Huang, I.J. Jen, S.S. Lin, and P. Sajgalik Surf. Coat. Technol. 192 2005 106 111
- (2005) Surf. Coat. Technol. , vol.192 , pp. 106-111
- Lii, D.F.¹ Huang, J.L.² Jen, I.J.³ Lin, S.S.⁴ Sajgalik, P.⁵

22
- 51749085079
- C.Y. Hsu, T.F. Ko, and Y.M. Huang J. Eur. Ceram. Soc. 28 2008 3065 3070
- (2008) J. Eur. Ceram. Soc. , vol.28 , pp. 3065-3070
- Hsu, C.Y.¹ Ko, T.F.² Huang, Y.M.³

23
- 0035851311
- X.T. Tao, J. Ma, D.H. Zhang, T.L. Yang, H.L. Ma, Y.G. Yang, C.F. Cheng, and J. Huang Appl. Surf. Sci. 183 2001 137 142
- (2001) Appl. Surf. Sci. , vol.183 , pp. 137-142
- Tao, X.T.¹ Ma, J.² Zhang, D.H.³ Yang, T.L.⁴ Ma, H.L.⁵ Yang, Y.G.⁶ Cheng, C.F.⁷ Huang, J.⁸

24
- 0242366728
- Y.S. Jung, J.Y. Seo, D.W. Lee, and D.Y. Jeon Thin Solid Films 445 2003 63 71
- (2003) Thin Solid Films , vol.445 , pp. 63-71
- Jung, Y.S.¹ Seo, J.Y.² Lee, D.W.³ Jeon, D.Y.⁴

25
- 0030710677
- Y. Djaoued, V.H. Phong, S. Badilescu, P.V. Ashrit, F.E. Girouard, and V.-V. Truong Thin Solid Films 293 1997 108 112
- (1997) Thin Solid Films , vol.293 , pp. 108-112
- Djaoued, Y.¹ Phong, V.H.² Badilescu, S.³ Ashrit, P.V.⁴ Girouard, F.E.⁵ Truong, V.-V.⁶

26
- 33745725599
- H. Han, J.W. Mayer, and T.L. Alford J. Appl. Phys. 99 2006 1 7 123711
- (2006) J. Appl. Phys. , vol.99 , pp. 1-7
- Han, H.¹ Mayer, J.W.² Alford, T.L.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.