Pulsed laser deposition of indium tin oxide films on flexible polyethylene naphthalate display substrates at room temperature

Thin Solid Films

Volumn 518, Issue 10, 2010, Pages 2623-2627

  Sierros, Konstantinos A ^a,b   Cairns, Darran R ^a,b   Abell, J Stuart ^b   Kukureka, Stephen N ^b  

^a West Virginia University   (United States)

^b UNIVERSITY OF BIRMINGHAM   (United Kingdom)

Author keywords

Flexible devices; Indium tin oxide; Polyethylene naphthalate

Indexed keywords

ADHESIVE PROPERTIES; DEPOSITION PRESSURES; ELECTRICAL RESISTIVITY; FLEXIBLE DEVICE; HIGH QUALITY; INDIUM TIN OXIDE; INDIUM TIN OXIDE FILMS; ITO FILMS; MICRO-STRUCTURAL; OPTICAL TRANSMISSIONS; OXYGEN GAS PRESSURE; OXYGEN PRESSURE; POLYETHYLENE NAPHTHALATE; POLYETHYLENE NAPTHALATE; POLYMER SUBSTRATE; ROOM TEMPERATURE; SURFACE ADHESION; THERMAL CONDITION; THIN LAYERS; THIN SOLID FILM; THIN STRUCTURE; TRANSPARENT CONDUCTING OXIDE; UNIAXIAL TENSILE TESTING;

ELECTRIC CONDUCTIVITY; FLEXIBLE DISPLAYS; FUNCTIONAL POLYMERS; INDIUM; ITO GLASS; LIGHT TRANSMISSION; MECHANICAL PROPERTIES; OPTICAL PROPERTIES; OXYGEN; PHOTOLITHOGRAPHY; PULSED LASER DEPOSITION; PULSED LASERS; TENSILE TESTING; THERMOPLASTICS; TIN; TITANIUM COMPOUNDS;

OXIDE FILMS;

EID: 76049105034     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.08.002     Document Type: Article

References (23)

1. Ginley D.S., and Bright C. MRS Bull. 25 (2000) 15
2. Granqvist C.G., and Hultaker A. Thin Solid Films 411 (2002) 1
3. Gordon R. MRS Bull. (2000) 56
4. MacDonald W.A. J. Mater. Chem. 14 (2004) 4
5. Minami T., Sonohara H., Kakumu T., and Takata S. Thin Solid Films 270 (1995) 37
6. Shin J.H., Shin S.H., Park J.I., and Kim H.H. J. Appl. Phys. 89 (2001) 5199
7. Kim D. J. Non-Cryst. Solids 331 (2003) 41
8. Kim H., Horwitz J.S., Kushto G.P., Kafafi Z.H., and Chrisey D.B. Appl. Phys. Lett. 79 (2001) 284
9. Izumi H., Ishihara T., Yoshioka H., and Motoyama M. Thin Solid Films 411 (2002) 32
10. Crawford G.P. In: Crawford G.P. (Ed). Flexible Flat Panel Display Technology, Series in Display Technology, Wiley (2005) 1
11. Cairns D.R., Witte II R.P., Sparacin D.K., Sachsman S.M., Paine D.C., Newton R.R., and Crawford G.P. Appl. Phys. Lett. 76 (2000) 1425
12. Cairns D.R., Paine D.C., and Crawford G.P. In: Blank D.H., Ginley D.S., Hawley M.E., Streiffer S.K., and Paine D.C. (Eds). Transport and Microstructual Phenomena in Oxide Electronics, San Fransisco, U.S.A, April 17-21, 2001. Materials Research Society Symposium Proceedings vol. 666 (2001) F3.24.1
13. MacDonald W.A., Mace J.M., and Polack N.P. 45th Annual Technical Conference Proceedings, Society of Vacuum Coaters, Lake Buena Vista, U.S.A, April 15-16 (2002) 482
14. Han H., Adams D., Mayer J.W., and Alford T.L. J. Appl. Phys. 98 (2005) 83705
15. Kim H., Piqué A., Horwitz J.S., Mattoussi H., Murata H., Kafafi Z.H., and Chrisey D.B. Appl. Phys. Lett. 86 (1999) 6451
16. Adurodija F.O., Izumi H., Ishihara T., Yoshioka H., Matsui H., and Motoyama M. Appl. Phys. Lett. 74 (1999) 3059
17. Paine D.C., Yeom H.-Y., and Yaglioglu B. In: Crawford G.P. (Ed). Flexible Flat Panel Display Technology, Series in Display Technology, Wiley (2005) 94
18. Adurodija F.O., Izumi H., Ishihara T., Yoshioka H., and Motoyama M. J. Vac. Sci. Technol., A 18 (2000) 814
19. Meyer E., Overney R.M., Dransfeld K., and Cyalog T. Nanoscience: Friction and Rheology on the Nanometer Scale World Scientific, Singapore (1998)
20. Bhushan B., and Dandavate C. J. Appl. Phys. 87 (2000) 1201
21. Beach E.R., Tormoen G.W., and Drelich J. J. Colloid Interface Sci. 247 (2002) 84
22. Morales-Paliza M.A., Hanglund Jr. R.F., and Feldman L.C. Appl. Phys. Lett. 80 (2002) 3757
23. Kim S.H., Park N.-M., Kim T.Y., and Sung G.Y. Thin Solid Films 475 (2005) 262