Regeneration of pyrolyzed photoresist film by heat treatment

Analytical Chemistry

Volumn 83, Issue 6, 2011, Pages 2397-2402

  Gross, Andrew J ^a   Downard, Alison J ^a  

^a UNIVERSITY OF CANTERBURY   (New Zealand)

Author keywords

[No Author keywords available]

Indexed keywords

AFTER-HEAT TREATMENT; ARYLDIAZONIUM SALTS; COVALENTLY BOUND; ELECTROCHEMICAL CHARACTERISTICS; ELECTROCHEMICAL MEASUREMENTS; ELECTROGRAFTING; N INCORPORATION; ORGANIC FILMS; OXYGEN CONTENT; PYROLYZED PHOTORESIST FILMS; SPECIFIC INTERACTION; THIN ORGANIC FILMS; WATER CONTACT ANGLE MEASUREMENT; XPS MEASUREMENTS;

ANGLE MEASUREMENT; ARGON; ATOMIC FORCE MICROSCOPY; ATOMIC SPECTROSCOPY; CONTACT ANGLE; HEAT TREATMENT; OXYGEN; PHOTORESISTS; PYROLYSIS; WATER CONTENT;

X RAY PHOTOELECTRON SPECTROSCOPY;

CARBON; PYROLYTIC CARBON;

ARTICLE; CHEMISTRY; ELECTROCHEMISTRY; HEAT; SURFACE PROPERTY;

CARBON; ELECTROCHEMISTRY; HOT TEMPERATURE; SURFACE PROPERTIES;

EID: 79954619277     PISSN: 00032700     EISSN: None     Source Type: Journal    
DOI: 10.1021/ac103264v     Document Type: Article

References (47)

1. Kim, J.; Song, X.; Kinoshita, K.; Madou, M.; White, R. J. Electrochem. Soc. 1998, 145, 2314-2319.
2. Ranganathan, S.; McCreery, R. L. Anal. Chem. 2001, 73, 893-900.
3. Lee, J. A.; Lee, S.; Lee, K. C.; Il Park, S.; Lee, S. S. J. Micromech. Microeng. 2008, 18, 035012.
4. Teixidor, G. T.; Gorkin, R. A.; Tripathi, P. P.; Bisht, G. S.; Kulkarni, M.; Maiti, K. T.; Battacharyya, T. K.; Subramaniam, J. R.; Sharma, A.; Park, B. Y.; Madou, M. Biomed. Mater. 2008, 3, 034116.
5. Du, R.; Ssenyange, S.; Aktary, M.; McDermott, M. T. Small 2009, 5, 1162-1168.
6. Zachek, M. K.; Takmakov, P.; Moody, B.; Wightman, R. M.; McCarty, G. S. Anal. Chem. 2009, 81, 6258-6265.
7. Fischer, D. J.; Hulvey, M. K.; Regel, A. R.; Lunte, S. M. Electrophoresis 2009, 30, 3324-3333.
8. Rawson, F. J.; Garrett, D. J.; Leech, D.; Downard, A. J.; Baronian, K. H. R. Biosens. Bioelectron. 2011, 26, 2383-2389 .
9. Lee, J. A.; Hwang, S.; Kwak, J.; Il Park, S.; Lee, S. S.; Lee, K. C. Sens. Actuators, B. 2008, 129, 372-379.
10. Hebert, N. E.; Snyder, B.; McCreery, R. L.; Kuhr, W. G.; Brazill, S. A. Anal. Chem. 2003, 75, 4265-4271.
11. Lee, J. A.; Lee, S. S.; Lee, K. C.; Il Park, S.; Woo, B. C.; Lee, J. O. Appl. Phys. Lett. 2007, 90, 264103.
12. Wang, C. L.; Taherabadi, L.; Jia, G. Y.; Madou, M.; Yeh, Y. T.; Dunn, B. Electrochem. Solid-State Lett. 2004, 7, A435-A438.
13. McCreery, R. L.; Wu, J.; Kalakodimi, R. P. Phys. Chem. Chem. Phys. 2006, 8, 2572-2590.
14. Kalakodimi, R. P.; Nowak, A. M.; McCreery, R. L. Chem. Mater. 2005, 17, 4939-4948.
15. Bonifas, A. P.; McCreery, R. L. Nat. Nanotechnol. 2010, 5, 612-617.
16. McCreery, R. L. Method for Conductance Switching in Molecular Electronic Junctions, U.S. Patent No. 6855950, 2005.
17. Brooksby, P. A.; Downard, A. J. Langmuir 2004, 20, 5038-5045.
18. Anariba, F.; DuVall, S. H.; McCreery, R. L. Anal. Chem. 2003, 75, 3837-3844.
19. Lehr, J.; Garrett, D. J.; Paulik, M. G.; Flavel, B. S.; Brooksby, P. A.; Williamson, B. E.; Downard, A. J. Anal. Chem. 2010, 82, 7027-7034.
20. Leroux, Y. R.; Fei, H.; Noël, J. M.; Roux, C.; Hapiot, P. J. Am. Chem. Soc. 2010, 132, 14039-14041.
21. Zhou, H.; Gupta, A.; Zou, T.; Zhou, J. Int. J. Mol. Sci. 2007, 8, 884-893.
22. Nasraoui, R.; Bergamini, J. F.; Ababou-Girard, S.; Geneste, F. J. Solid State Electrochem. 2010, 1-8.
23. Barman, S.; Deng, F.; McCreery, R. L. J. Am. Chem. Soc. 2008, 130, 11073-11081.
24. Gross, A. J.; Yu, S. S. C.; Downard, A. J. Langmuir 2010, 26, 7285-7292.
25. Yu, S. S. C.; Downard, A. J. Langmuir 2007, 23, 4662-4668.
26. Ssenyange, S.; Anariba, F.; Bocian, D. F.; McCreery, R. L. Langmuir 2005, 21, 11105-11112.
27. Laws, D. R.; Sheats, J.; Rheingold, A. L.; Geiger, W. E. Langmuir 2010, 26, 15010-15021.
28. Gui, A. L.; Liu, G.; Chockalingam, M.; Saux, G. L.; Harper, J. B.; Gooding, J. J. Electroanalysis 2010, 22, 1283-1289.
29. Kissinger, P. T.; Heineman, W. R. Laboratory Techniques in Electroanalytical Chemistry; Marcel Dekker, Inc.: New York, 1996.
30. Zhang, H.; Coury, L. A. Anal. Chem. 1993, 65, 1552-1558.
31. Stutts, K. J.; Kovach, P. M.; Kuhr, W. G.; Wightman, R. M. Anal. Chem. 1983, 55, 1632-1634.
32. Toupin, M.; Bélanger, D. J. Phys. Chem. C 2007, 111 5394-5401.
33. Fagan, D. T.; Hu, I. F.; Kuwana, T. Anal. Chem. 1985, 57 2759-2763.
34. Takmakov, P.; Zachek, M. K.; Keithley, R. B.; Walsh, P. L.; Donley, C.; McCarty, G. S.; Wightman, R. M. Anal. Chem. 2010, 82, 2020-2028.
35. Ranganathan, S.; Kuo, T. C.; McCreery, R. L. Anal. Chem. 1999, 71, 3574-3580.
36. Bahr, J. L.; Yang, J.; Kosynkin, D. V.; Bronikowski, M. J.; Smalley, R. E.; Tour, J. M. J. Am. Chem. Soc. 2001, 123, 6536-6542.
37. Dyke, C. A.; Tour, J. M. Chem.-Eur. J. 2004, 10, 812-817.
38. Saunders, K. H.; Allen, R. L. M. Aromatic Diazo Compounds; 3rd ed.; Edward Arnold: London, 1985.
39. Loring, J. S. PhD thesis, University of California, Davis, 2000.
40. Downard, A. J.; Garrett, D. J.; Tan, E. S. Q. Langmuir 2006, 22, 10739-10746.
41. Saby, C.; Ortiz, B.; Champagne, G. Y.; Bélanger, D. Langmuir 1997, 13, 6805-6813.
42. Yu, S. S. C.; Tan, E. S. Q.; Jane, R. T.; Downard, A. J. Langmuir 2007, 23, 11074-11082.
43. Hinge, M.; Gonc-alves, E. S.; Pedersen, S. U.; Daasbjerg, K. Surf. Coat. Technol. 2010, 205, 820-827.
44. Fairman, C.; Yu, S. S. C.; Liu, G.; Downard, A. J.; Hibbert, D. B.; Gooding, J. J. J. Solid State Electrochem. 2008, 12, 1357-1365.
45. Doppelt, P.; Hallais, G.; Pinson, J.; Podvorica, F.; Verneyre, S. Chem. Mater. 2007, 19, 4570-4575.
46. Lehr, J.; Williamson, B. E.; Flavel, B. S.; Downard, A. J. Langmuir 2009, 25, 13503-13509.
47. Suzuki, T.; Kyotani, T.; Tomita, A. Ind. Eng. Chem. Res. 1994, 33, 2840-2845.