Resonance tracking ultrasonic atomic force microscopy

Surface and Interface Analysis

Volumn 33, Issue 2, 2002, Pages 89-91

  Kobayashi, K ^a   Yamada, H ^a   Matsushige, K ^a  

^a International Innovation Center   (Japan)

Author keywords

Atomic force microscopy; Frequency modulated detection method; Phase change recording medium; Resonance tracking technique; Ultrasonic atomic force microscopy

Indexed keywords

CANTILEVER BEAMS; ELASTICITY; INTERFACES (MATERIALS); NATURAL FREQUENCIES; PHASE LOCKED LOOPS; SILICON NITRIDE; SURFACE TOPOGRAPHY; ULTRASONIC MEASUREMENT; VIBRATIONS (MECHANICAL);

CONTACT RESONANCE FREQUENCY; FREQUENCY MODULATED DETECTION METHOD; NORMAL CONTACT MODE; PHASE CHANGE RECORDING MEDIUM; RESONANCE TRACKING ULTRASONIC ATOMIC FORCE MICROSCOPY;

ATOMIC FORCE MICROSCOPY;

EID: 0036471454     PISSN: 01422421     EISSN: None     Source Type: Journal    
DOI: 10.1002/sia.1168     Document Type: Article

References (11)