Femtosecond laser micromachining of silicon for MEMS

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4977, Issue , 2003, Pages 219-225

  El Bandrawy, M ^a   Gupta, Mool C ^a  

^a OLD DOMINION UNIVERSITY   (United States)

Author keywords

Ablation; Femtosecond; Grating; Laser; MEMS; Micromachining; Silicon; Ultrashort pulses

Indexed keywords

DIFFRACTION GRATINGS; LASER ABLATION; MICROMACHINING; OPTICAL MICROSCOPY; PROFILOMETRY; SILICON WAFERS; ULTRASHORT PULSES;

FEMTOSECOND LASER; LASER MICROMACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0344551200     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.479556     Document Type: Conference Paper

References (8)

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