A study of femtosecond laser interaction with wafer grade Silicon

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4876, Issue 1, 2002, Pages 487-499

  Coyne, E ^a,b   Magee, J ^b   Mannion, Paul ^b   O'Connor, G ^b  

^a ANALOG DEVICES   (Ireland)

^b NATIONAL UNIVERSITY OF IRELAND   (Ireland)

Author keywords

Ablated depth per pulse; Electron hole pairs; Femtosecond pulses; Laser fluence; Scanning Electron Microscope (SEM); Silicon lattice

Indexed keywords

ELECTRON MICROSCOPY; INTERFEROMETERS; LASER ABLATION; OPTICAL MICROSCOPY; OPTICAL RESOLVING POWER; SILICON WAFERS;

FEMTOSECOND PULSES;

ULTRASHORT PULSES;

EID: 0041560970     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.463752     Document Type: Conference Paper

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