Effects of annealing conditions on the surface morphology and crystallinity of sputtered ZnO nano films

Sains Malaysiana

Volumn 40, Issue 3, 2011, Pages 209-213

  Karamdel, J ^b   Dee, C F ^a   Majlis, B Yeop ^a  

^a INSTITUTE OF MICROENGINEERING AND NANOELECTRONICS IMEN   (Malaysia)

^b ISLAMIC AZAD UNIVERSITY   (Iran)

Author keywords

Annealing; Sputtering; ZnO nano film

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CRYSTALLINITY; GAS FLOW; GRAIN SIZE; NANOTECHNOLOGY; SCANNING ELECTRON MICROSCOPY; TEMPERATURE; X-RAY DIFFRACTION;

EID: 79952912055     PISSN: 01266039     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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